JPS54123077A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS54123077A
JPS54123077A JP2993678A JP2993678A JPS54123077A JP S54123077 A JPS54123077 A JP S54123077A JP 2993678 A JP2993678 A JP 2993678A JP 2993678 A JP2993678 A JP 2993678A JP S54123077 A JPS54123077 A JP S54123077A
Authority
JP
Japan
Prior art keywords
pressure
hole
absolute
atmosphere
hand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2993678A
Other languages
English (en)
Inventor
Kiyomitsu Suzuki
Motohisa Nishihara
Hiroji Kawakami
Minoru Takahashi
Komei Yatsuno
Hideo Sato
Shigeyuki Kobori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2993678A priority Critical patent/JPS54123077A/ja
Priority to AU45002/79A priority patent/AU4500279A/en
Priority to DE19792943231 priority patent/DE2943231A1/de
Priority to GB7937207A priority patent/GB2036425B/en
Priority to PCT/JP1979/000062 priority patent/WO1979000783A1/ja
Priority to FR7906606A priority patent/FR2420210A1/fr
Priority to IT21081/79A priority patent/IT1111588B/it
Publication of JPS54123077A publication Critical patent/JPS54123077A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2993678A 1978-03-17 1978-03-17 Pressure sensor Pending JPS54123077A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor
AU45002/79A AU4500279A (en) 1978-03-17 1979-03-09 Semiconductor pressure sensor
DE19792943231 DE2943231A1 (de) 1978-03-17 1979-03-12 Semiconductor pressure sensors having a plurality of pressure-sensitive diaphragms and method of manufacturing the same
GB7937207A GB2036425B (en) 1978-03-17 1979-03-12 Semiconductor pressure sensor having a plurality of pressure-sensitive diaphragms and method of manufacturing the same
PCT/JP1979/000062 WO1979000783A1 (fr) 1978-03-17 1979-03-12 Capteurs de pression a semi-conducteurs ayant une pluralite de diaphragmes sensibles a la pression et leur methode de fabrication
FR7906606A FR2420210A1 (fr) 1978-03-17 1979-03-15 Detecteur de pression semi-conducteur a diaphragmes sensibles et methode de fonctionnement de ce dernier
IT21081/79A IT1111588B (it) 1978-03-17 1979-03-16 Sensore di pressione a semiconduttori,dotato di una pluralita' di diaframmi sensibili alla pressione e procedimento relativo

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS54123077A true JPS54123077A (en) 1979-09-25

Family

ID=12289864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2993678A Pending JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Country Status (6)

Country Link
JP (1) JPS54123077A (ja)
AU (1) AU4500279A (ja)
FR (1) FR2420210A1 (ja)
GB (1) GB2036425B (ja)
IT (1) IT1111588B (ja)
WO (1) WO1979000783A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915944U (ja) * 1982-07-21 1984-01-31 株式会社日立製作所 差圧検出器
US4475381A (en) * 1980-12-23 1984-10-09 Toyota Jidosha Kogyo Kabushiki Kaisha Method and apparatus for detecting pneumatic pressure in an internal combustion engine
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPH01172724A (ja) * 1987-12-28 1989-07-07 Matsushita Electric Ind Co Ltd 半導体圧力センサの製造方法
JPH01503001A (ja) * 1986-06-23 1989-10-12 ローズマウント　インコ コンデンサ形圧力センサおよび圧力センサ群
JPH01503326A (ja) * 1986-07-28 1989-11-09 ローズマウント　インコ 媒体分離形差圧センサ
JPH03200034A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH05273067A (ja) * 1992-03-25 1993-10-22 Hitachi Constr Mach Co Ltd 差圧センサ
JP2008542717A (ja) * 2005-05-26 2008-11-27 ローズマウント インコーポレイテッド 圧縮可能なセンサ本体を用いる圧力センサ

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407296A (en) * 1980-09-12 1983-10-04 Medtronic, Inc. Integral hermetic impantable pressure transducer
EP0049955A1 (en) * 1980-10-09 1982-04-21 General Motors Corporation Dual cavity pressure sensor
US4432372A (en) * 1981-08-28 1984-02-21 Medtronic, Inc. Two-lead power/signal multiplexed transducer
DE3772514D1 (de) * 1986-10-28 1991-10-02 Sumitomo Electric Industries Messverfahren fuer einen halbleiter-druckmessfuehler.
US4850228A (en) * 1987-05-27 1989-07-25 Smc Corporation Pressure meter
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
DE19648048C2 (de) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten
US7077008B2 (en) * 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
JP2008511003A (ja) * 2004-08-23 2008-04-10 ハネウェル・インターナショナル・インコーポレーテッド 微細加工された絶対圧検知ダイを使用している排ガス循環装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE336042B (ja) * 1967-05-03 1971-06-21 Mallory & Co Inc P R
JPS5135294A (ja) * 1974-09-20 1976-03-25 Hitachi Ltd
JPS5190587A (ja) * 1975-02-07 1976-08-09
JPS5255392A (en) * 1975-10-31 1977-05-06 Hitachi Ltd Semiconductor pressure sensor

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475381A (en) * 1980-12-23 1984-10-09 Toyota Jidosha Kogyo Kabushiki Kaisha Method and apparatus for detecting pneumatic pressure in an internal combustion engine
JPS5915944U (ja) * 1982-07-21 1984-01-31 株式会社日立製作所 差圧検出器
JPH01503001A (ja) * 1986-06-23 1989-10-12 ローズマウント　インコ コンデンサ形圧力センサおよび圧力センサ群
JPH01503326A (ja) * 1986-07-28 1989-11-09 ローズマウント　インコ 媒体分離形差圧センサ
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPH01172724A (ja) * 1987-12-28 1989-07-07 Matsushita Electric Ind Co Ltd 半導体圧力センサの製造方法
JPH03200034A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH05273067A (ja) * 1992-03-25 1993-10-22 Hitachi Constr Mach Co Ltd 差圧センサ
JP2008542717A (ja) * 2005-05-26 2008-11-27 ローズマウント インコーポレイテッド 圧縮可能なセンサ本体を用いる圧力センサ

Also Published As

Publication number Publication date
GB2036425B (en) 1983-02-09
AU4500279A (en) 1979-09-20
IT7921081A0 (it) 1979-03-16
FR2420210A1 (fr) 1979-10-12
GB2036425A (en) 1980-06-25
FR2420210B1 (ja) 1984-07-06
IT1111588B (it) 1986-01-13
WO1979000783A1 (fr) 1979-10-18

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