FR2420210A1 - Detecteur de pression semi-conducteur a diaphragmes sensibles et methode de fonctionnement de ce dernier - Google Patents

Detecteur de pression semi-conducteur a diaphragmes sensibles et methode de fonctionnement de ce dernier

Info

Publication number
FR2420210A1
FR2420210A1 FR7906606A FR7906606A FR2420210A1 FR 2420210 A1 FR2420210 A1 FR 2420210A1 FR 7906606 A FR7906606 A FR 7906606A FR 7906606 A FR7906606 A FR 7906606A FR 2420210 A1 FR2420210 A1 FR 2420210A1
Authority
FR
France
Prior art keywords
crystal wafer
semiconductor
single crystal
strain gauges
insulation substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7906606A
Other languages
English (en)
Other versions
FR2420210B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2420210A1 publication Critical patent/FR2420210A1/fr
Application granted granted Critical
Publication of FR2420210B1 publication Critical patent/FR2420210B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

Détecteur de pression semi-conducteur possédant une plaquette à cristal unique semi-conducteur et un substrat d'isolation. Sur cette plaquette en cristal unique semi-conducteur, deux diaphragmes sensibles à la pression sont formés par deux cavités et sur chaque diaphragme est construite une paire de jauges de contrainte. Sur cette même plaquette à cristal unique semi-conducteur, des calibres à électrodes sont en plus construits pour la connexion électrique de ces jauges de contrainte. La plaquette est fixée sur le substrat d'isolation en borosilicate de verre, de façon à former entre eux deux chambres. Une de ces deux chambres est une chambre à vide, et dans l'autre le vide d'une tubulure de moteur y est amené par l'intermédiaire d'un trou formé sur le substrat d'isolation. Par conséquent, une pression absolue d'atmosphère et une pression relative du vide dans la tubulure par rapport à l'atmosphère sont obtenues en détectant les résistances sensibles à la contrainte des deux pièces des jauges de contrainte, respectivement. Et l'assemblage de la plaquette à cristal unique semi-conducteur et du substrat désolation en verre est réalisé par la méthode de liaison anordique.
FR7906606A 1978-03-17 1979-03-15 Detecteur de pression semi-conducteur a diaphragmes sensibles et methode de fonctionnement de ce dernier Granted FR2420210A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993678A JPS54123077A (en) 1978-03-17 1978-03-17 Pressure sensor

Publications (2)

Publication Number Publication Date
FR2420210A1 true FR2420210A1 (fr) 1979-10-12
FR2420210B1 FR2420210B1 (fr) 1984-07-06

Family

ID=12289864

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7906606A Granted FR2420210A1 (fr) 1978-03-17 1979-03-15 Detecteur de pression semi-conducteur a diaphragmes sensibles et methode de fonctionnement de ce dernier

Country Status (6)

Country Link
JP (1) JPS54123077A (fr)
AU (1) AU4500279A (fr)
FR (1) FR2420210A1 (fr)
GB (1) GB2036425B (fr)
IT (1) IT1111588B (fr)
WO (1) WO1979000783A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047986A3 (en) * 1980-09-12 1982-04-28 Medtronic, Inc. Integral hermetic implantable pressure transducer
DE3232009A1 (de) * 1981-08-28 1983-03-10 Medtronic, Inc., 55440 Minneapolis, Minn. Implantierbare wandleranordnung
EP0265816A3 (en) * 1986-10-28 1989-06-21 Sumitomo Electric Industries Limited Method and measuring semiconductor pressure sensor
WO2006023936A1 (fr) * 2004-08-23 2006-03-02 Honeywell International Inc. Systeme de recyclage des gaz d'echappement dans lequel est utilisee une puce electromecanique de detection de pression absolue
WO2006023987A1 (fr) * 2004-08-23 2006-03-02 Honeywell International Inc. Mesure de pression differentielle par detection a l'arriere et avec circuit asic unique

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0049955A1 (fr) * 1980-10-09 1982-04-21 General Motors Corporation Capteur de pression à deux cavités
JPS57104835A (en) * 1980-12-23 1982-06-30 Toyota Motor Corp Detecting method for pressure in internal combustion engine
JPS5915944U (ja) * 1982-07-21 1984-01-31 株式会社日立製作所 差圧検出器
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
US4850228A (en) * 1987-05-27 1989-07-25 Smc Corporation Pressure meter
JPS6461634A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Industrial Co Ltd Semiconductor pressure sensor
JPH0814518B2 (ja) * 1987-12-28 1996-02-14 松下電器産業株式会社 半導体圧力センサの製造方法
JPH03200034A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JP2771070B2 (ja) * 1992-03-25 1998-07-02 日立建機株式会社 差圧センサ
AU658524B1 (en) * 1993-08-17 1995-04-13 Yokogawa Electric Corporation Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
DE19648048C2 (de) * 1995-11-21 2001-11-29 Fuji Electric Co Ltd Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten
US7401522B2 (en) * 2005-05-26 2008-07-22 Rosemount Inc. Pressure sensor using compressible sensor body

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE336042B (fr) * 1967-05-03 1971-06-21 Mallory & Co Inc P R
JPS5135294A (fr) * 1974-09-20 1976-03-25 Hitachi Ltd
JPS5190587A (fr) * 1975-02-07 1976-08-09
JPS5255392A (en) * 1975-10-31 1977-05-06 Hitachi Ltd Semiconductor pressure sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047986A3 (en) * 1980-09-12 1982-04-28 Medtronic, Inc. Integral hermetic implantable pressure transducer
DE3232009A1 (de) * 1981-08-28 1983-03-10 Medtronic, Inc., 55440 Minneapolis, Minn. Implantierbare wandleranordnung
EP0265816A3 (en) * 1986-10-28 1989-06-21 Sumitomo Electric Industries Limited Method and measuring semiconductor pressure sensor
US7077008B2 (en) 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
WO2006023936A1 (fr) * 2004-08-23 2006-03-02 Honeywell International Inc. Systeme de recyclage des gaz d'echappement dans lequel est utilisee une puce electromecanique de detection de pression absolue
WO2006023987A1 (fr) * 2004-08-23 2006-03-02 Honeywell International Inc. Mesure de pression differentielle par detection a l'arriere et avec circuit asic unique

Also Published As

Publication number Publication date
GB2036425B (en) 1983-02-09
AU4500279A (en) 1979-09-20
IT7921081A0 (it) 1979-03-16
GB2036425A (en) 1980-06-25
FR2420210B1 (fr) 1984-07-06
JPS54123077A (en) 1979-09-25
IT1111588B (it) 1986-01-13
WO1979000783A1 (fr) 1979-10-18

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