JPS5417663A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5417663A
JPS5417663A JP8224277A JP8224277A JPS5417663A JP S5417663 A JPS5417663 A JP S5417663A JP 8224277 A JP8224277 A JP 8224277A JP 8224277 A JP8224277 A JP 8224277A JP S5417663 A JPS5417663 A JP S5417663A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
etching
section
aperturepart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8224277A
Other languages
Japanese (ja)
Inventor
Seiji Takao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8224277A priority Critical patent/JPS5417663A/en
Publication of JPS5417663A publication Critical patent/JPS5417663A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To evade disconnection of a metal wiring provided onto an aperturepart section formed by etching by sloping the section, by etching the ion-injected surface circumference region of an insulation film faster than a non-injection region.
COPYRIGHT: (C)1979,JPO&Japio
JP8224277A 1977-07-08 1977-07-08 Manufacture of semiconductor device Pending JPS5417663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8224277A JPS5417663A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8224277A JPS5417663A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5417663A true JPS5417663A (en) 1979-02-09

Family

ID=13768937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8224277A Pending JPS5417663A (en) 1977-07-08 1977-07-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5417663A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263138A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61263138A (en) * 1985-05-16 1986-11-21 Rohm Co Ltd Manufacture of semiconductor device

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