JPS5419359A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS5419359A
JPS5419359A JP8485577A JP8485577A JPS5419359A JP S5419359 A JPS5419359 A JP S5419359A JP 8485577 A JP8485577 A JP 8485577A JP 8485577 A JP8485577 A JP 8485577A JP S5419359 A JPS5419359 A JP S5419359A
Authority
JP
Japan
Prior art keywords
epitaxial growth
growth method
flow
epitaxial
superposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8485577A
Other languages
Japanese (ja)
Inventor
Mitsutoshi Hibino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8485577A priority Critical patent/JPS5419359A/en
Publication of JPS5419359A publication Critical patent/JPS5419359A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To prevent autodoping to epitaxial layers by flowing a carrier gas superposed with vibrating flow or pulse flow on substrates being heated prior to epitaxial growth.
COPYRIGHT: (C)1979,JPO&Japio
JP8485577A 1977-07-14 1977-07-14 Epitaxial growth method Pending JPS5419359A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8485577A JPS5419359A (en) 1977-07-14 1977-07-14 Epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8485577A JPS5419359A (en) 1977-07-14 1977-07-14 Epitaxial growth method

Publications (1)

Publication Number Publication Date
JPS5419359A true JPS5419359A (en) 1979-02-14

Family

ID=13842408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8485577A Pending JPS5419359A (en) 1977-07-14 1977-07-14 Epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5419359A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009091948A (en) * 2007-10-05 2009-04-30 Tokyo Radiator Mfg Co Ltd EGR cooler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009091948A (en) * 2007-10-05 2009-04-30 Tokyo Radiator Mfg Co Ltd EGR cooler

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