JPS5420657A - Sample processor for scanning electron microscope and its similar device - Google Patents

Sample processor for scanning electron microscope and its similar device

Info

Publication number
JPS5420657A
JPS5420657A JP8510477A JP8510477A JPS5420657A JP S5420657 A JPS5420657 A JP S5420657A JP 8510477 A JP8510477 A JP 8510477A JP 8510477 A JP8510477 A JP 8510477A JP S5420657 A JPS5420657 A JP S5420657A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
similar device
sample processor
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8510477A
Other languages
Japanese (ja)
Inventor
Akimitsu Okura
Naotake Saito
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8510477A priority Critical patent/JPS5420657A/en
Publication of JPS5420657A publication Critical patent/JPS5420657A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to manufacture and process a sample easily, by providing a sample processor independently of a standby exhaust chamber.
COPYRIGHT: (C)1979,JPO&Japio
JP8510477A 1977-07-18 1977-07-18 Sample processor for scanning electron microscope and its similar device Pending JPS5420657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8510477A JPS5420657A (en) 1977-07-18 1977-07-18 Sample processor for scanning electron microscope and its similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8510477A JPS5420657A (en) 1977-07-18 1977-07-18 Sample processor for scanning electron microscope and its similar device

Publications (1)

Publication Number Publication Date
JPS5420657A true JPS5420657A (en) 1979-02-16

Family

ID=13849296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8510477A Pending JPS5420657A (en) 1977-07-18 1977-07-18 Sample processor for scanning electron microscope and its similar device

Country Status (1)

Country Link
JP (1) JPS5420657A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146346U (en) * 1982-03-26 1983-10-01 日本電子株式会社 Sample exchange equipment for scanning electron microscopes, etc.
JPS61162939U (en) * 1985-03-29 1986-10-08
WO2014069325A1 (en) * 2012-10-31 2014-05-08 株式会社日立ハイテクノロジーズ Electron beam microscope apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146346U (en) * 1982-03-26 1983-10-01 日本電子株式会社 Sample exchange equipment for scanning electron microscopes, etc.
JPS61162939U (en) * 1985-03-29 1986-10-08
WO2014069325A1 (en) * 2012-10-31 2014-05-08 株式会社日立ハイテクノロジーズ Electron beam microscope apparatus
JP2014089936A (en) * 2012-10-31 2014-05-15 Hitachi High-Technologies Corp Electron beam microscopic device

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