JPS5422158A - Impurity diffusion method to semiconductor - Google Patents

Impurity diffusion method to semiconductor

Info

Publication number
JPS5422158A
JPS5422158A JP8761077A JP8761077A JPS5422158A JP S5422158 A JPS5422158 A JP S5422158A JP 8761077 A JP8761077 A JP 8761077A JP 8761077 A JP8761077 A JP 8761077A JP S5422158 A JPS5422158 A JP S5422158A
Authority
JP
Japan
Prior art keywords
semiconductor
impurity diffusion
diffusion method
acid
soaking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8761077A
Other languages
Japanese (ja)
Inventor
Eizo Fujii
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8761077A priority Critical patent/JPS5422158A/en
Publication of JPS5422158A publication Critical patent/JPS5422158A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a diffusion layer with a low concentration and high precision by giving a heat treatment after soaking the substrate into the heated mixture solution of the liquid (phosphoric acid, boric acid,etc.) containing the compound of the diffused impurity and the oxide agent (sulfuric acid, nitric acid, etc.).
COPYRIGHT: (C)1979,JPO&Japio
JP8761077A 1977-07-20 1977-07-20 Impurity diffusion method to semiconductor Pending JPS5422158A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8761077A JPS5422158A (en) 1977-07-20 1977-07-20 Impurity diffusion method to semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8761077A JPS5422158A (en) 1977-07-20 1977-07-20 Impurity diffusion method to semiconductor

Publications (1)

Publication Number Publication Date
JPS5422158A true JPS5422158A (en) 1979-02-19

Family

ID=13919728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8761077A Pending JPS5422158A (en) 1977-07-20 1977-07-20 Impurity diffusion method to semiconductor

Country Status (1)

Country Link
JP (1) JPS5422158A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133722U (en) * 1979-03-16 1980-09-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133722U (en) * 1979-03-16 1980-09-22

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