JPS5343473A - Impurity driving-in method - Google Patents

Impurity driving-in method

Info

Publication number
JPS5343473A
JPS5343473A JP11818176A JP11818176A JPS5343473A JP S5343473 A JPS5343473 A JP S5343473A JP 11818176 A JP11818176 A JP 11818176A JP 11818176 A JP11818176 A JP 11818176A JP S5343473 A JPS5343473 A JP S5343473A
Authority
JP
Japan
Prior art keywords
driving
impurity
impurity driving
damage
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11818176A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11818176A priority Critical patent/JPS5343473A/en
Publication of JPS5343473A publication Critical patent/JPS5343473A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform driving-in of not lowering surface concentration without producing any damage on wafer surfaces by performing heat treatment in an inert gas containing a slight amount of oxidative gas.
COPYRIGHT: (C)1978,JPO&Japio
JP11818176A 1976-09-30 1976-09-30 Impurity driving-in method Pending JPS5343473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11818176A JPS5343473A (en) 1976-09-30 1976-09-30 Impurity driving-in method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11818176A JPS5343473A (en) 1976-09-30 1976-09-30 Impurity driving-in method

Publications (1)

Publication Number Publication Date
JPS5343473A true JPS5343473A (en) 1978-04-19

Family

ID=14730134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11818176A Pending JPS5343473A (en) 1976-09-30 1976-09-30 Impurity driving-in method

Country Status (1)

Country Link
JP (1) JPS5343473A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577121A (en) * 1980-06-17 1982-01-14 Fujitsu Ltd Manufacture of semiconductor device
JPS5927524A (en) * 1982-08-07 1984-02-14 Mitsubishi Electric Corp Fabrication of semiconductor device
JPS59108316A (en) * 1982-12-14 1984-06-22 Fuji Electric Corp Res & Dev Ltd Manufacture of semiconductor device
JPS63114121A (en) * 1986-07-07 1988-05-19 Nec Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577121A (en) * 1980-06-17 1982-01-14 Fujitsu Ltd Manufacture of semiconductor device
JPS5927524A (en) * 1982-08-07 1984-02-14 Mitsubishi Electric Corp Fabrication of semiconductor device
JPS59108316A (en) * 1982-12-14 1984-06-22 Fuji Electric Corp Res & Dev Ltd Manufacture of semiconductor device
JPS63114121A (en) * 1986-07-07 1988-05-19 Nec Corp Manufacture of semiconductor device

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