JPS542300A - Methdo and apparatus for vapor phase growth of magnespinel - Google Patents

Methdo and apparatus for vapor phase growth of magnespinel

Info

Publication number
JPS542300A
JPS542300A JP6725277A JP6725277A JPS542300A JP S542300 A JPS542300 A JP S542300A JP 6725277 A JP6725277 A JP 6725277A JP 6725277 A JP6725277 A JP 6725277A JP S542300 A JPS542300 A JP S542300A
Authority
JP
Japan
Prior art keywords
magnespinel
vapor phase
phase growth
methdo
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6725277A
Other languages
Japanese (ja)
Other versions
JPS5855119B2 (en
Inventor
Masaru Ihara
Masayuki Chifuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP52067252A priority Critical patent/JPS5855119B2/en
Publication of JPS542300A publication Critical patent/JPS542300A/en
Publication of JPS5855119B2 publication Critical patent/JPS5855119B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To carry out vapor phase growth of magnespinel shown by nMgO,Al2O3, by bringing a mixed gas of a reaction product gas of liquid or solid Al and HCl gas, a reaction product gas of solid Mg and HCl gas, and CO2 into contact with single crystal substrates.
COPYRIGHT: (C)1979,JPO&Japio
JP52067252A 1977-06-09 1977-06-09 Vapor phase growth method and equipment for magnesia spinel Expired JPS5855119B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52067252A JPS5855119B2 (en) 1977-06-09 1977-06-09 Vapor phase growth method and equipment for magnesia spinel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52067252A JPS5855119B2 (en) 1977-06-09 1977-06-09 Vapor phase growth method and equipment for magnesia spinel

Publications (2)

Publication Number Publication Date
JPS542300A true JPS542300A (en) 1979-01-09
JPS5855119B2 JPS5855119B2 (en) 1983-12-08

Family

ID=13339543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52067252A Expired JPS5855119B2 (en) 1977-06-09 1977-06-09 Vapor phase growth method and equipment for magnesia spinel

Country Status (1)

Country Link
JP (1) JPS5855119B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135996A (en) * 1979-04-12 1980-10-23 Okura Denki Co Ltd Signal processing circuit
JPS56146249A (en) * 1980-04-14 1981-11-13 Fujitsu Ltd Semiconductor device
JPS56146251A (en) * 1980-04-14 1981-11-13 Fujitsu Ltd Semiconductor device and manufacture therefor
US4300979A (en) * 1980-11-03 1981-11-17 Bell Telephone Laboratories, Incorporated Growth of AlPO4 crystals
JPS5766120A (en) * 1980-10-13 1982-04-22 Teijin Ltd Preparation of pulplike particle
US4507169A (en) * 1981-06-29 1985-03-26 Fujitsu Limited Method and apparatus for vapor phase growth of a semiconductor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135996A (en) * 1979-04-12 1980-10-23 Okura Denki Co Ltd Signal processing circuit
JPS56146249A (en) * 1980-04-14 1981-11-13 Fujitsu Ltd Semiconductor device
JPS56146251A (en) * 1980-04-14 1981-11-13 Fujitsu Ltd Semiconductor device and manufacture therefor
JPS5766120A (en) * 1980-10-13 1982-04-22 Teijin Ltd Preparation of pulplike particle
US4300979A (en) * 1980-11-03 1981-11-17 Bell Telephone Laboratories, Incorporated Growth of AlPO4 crystals
US4507169A (en) * 1981-06-29 1985-03-26 Fujitsu Limited Method and apparatus for vapor phase growth of a semiconductor

Also Published As

Publication number Publication date
JPS5855119B2 (en) 1983-12-08

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