JPS5429977A - Detection system for position - Google Patents

Detection system for position

Info

Publication number
JPS5429977A
JPS5429977A JP9506277A JP9506277A JPS5429977A JP S5429977 A JPS5429977 A JP S5429977A JP 9506277 A JP9506277 A JP 9506277A JP 9506277 A JP9506277 A JP 9506277A JP S5429977 A JPS5429977 A JP S5429977A
Authority
JP
Japan
Prior art keywords
processing
detection system
detection
pattern
compressively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9506277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5653217B2 (da
Inventor
Yasuo Nakagawa
Toshimitsu Hamada
Mikio Hongo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9506277A priority Critical patent/JPS5429977A/ja
Publication of JPS5429977A publication Critical patent/JPS5429977A/ja
Publication of JPS5653217B2 publication Critical patent/JPS5653217B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9506277A 1977-08-10 1977-08-10 Detection system for position Granted JPS5429977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9506277A JPS5429977A (en) 1977-08-10 1977-08-10 Detection system for position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9506277A JPS5429977A (en) 1977-08-10 1977-08-10 Detection system for position

Publications (2)

Publication Number Publication Date
JPS5429977A true JPS5429977A (en) 1979-03-06
JPS5653217B2 JPS5653217B2 (da) 1981-12-17

Family

ID=14127525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9506277A Granted JPS5429977A (en) 1977-08-10 1977-08-10 Detection system for position

Country Status (1)

Country Link
JP (1) JPS5429977A (da)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54136180A (en) * 1978-04-14 1979-10-23 Hitachi Ltd Position detecting method for chip on semiconductor wafer
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JPS58208603A (ja) * 1982-05-31 1983-12-05 Hitachi Ltd 位置検出方法
JPS62188901A (ja) * 1987-02-06 1987-08-18 Canon Inc 光位置検知装置
JPH02194200A (ja) * 1989-01-20 1990-07-31 Eagle Ind Co Ltd めっき浴添加剤
JP2017503205A (ja) * 2013-12-31 2017-01-26 シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド 合焦レベリング装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE451924B (sv) * 1982-10-12 1987-11-02 Ericsson Telefon Ab L M Regulator for reglering av en laddningsstrom till en enskild cell i ett batteri av celler

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54136180A (en) * 1978-04-14 1979-10-23 Hitachi Ltd Position detecting method for chip on semiconductor wafer
JPS5788414A (en) * 1980-11-21 1982-06-02 Seiko Epson Corp Alignment device
JPS58208603A (ja) * 1982-05-31 1983-12-05 Hitachi Ltd 位置検出方法
JPS62188901A (ja) * 1987-02-06 1987-08-18 Canon Inc 光位置検知装置
JPH02194200A (ja) * 1989-01-20 1990-07-31 Eagle Ind Co Ltd めっき浴添加剤
JP2017503205A (ja) * 2013-12-31 2017-01-26 シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド 合焦レベリング装置

Also Published As

Publication number Publication date
JPS5653217B2 (da) 1981-12-17

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