JPS5653217B2 - - Google Patents
Info
- Publication number
- JPS5653217B2 JPS5653217B2 JP9506277A JP9506277A JPS5653217B2 JP S5653217 B2 JPS5653217 B2 JP S5653217B2 JP 9506277 A JP9506277 A JP 9506277A JP 9506277 A JP9506277 A JP 9506277A JP S5653217 B2 JPS5653217 B2 JP S5653217B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9506277A JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9506277A JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5429977A JPS5429977A (en) | 1979-03-06 |
| JPS5653217B2 true JPS5653217B2 (da) | 1981-12-17 |
Family
ID=14127525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9506277A Granted JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5429977A (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0628491B2 (ja) * | 1982-10-12 | 1994-04-13 | テレフォンアクチーボラゲット エル エム エリクソン | 充 電 調 整 器 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54136180A (en) * | 1978-04-14 | 1979-10-23 | Hitachi Ltd | Position detecting method for chip on semiconductor wafer |
| JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
| JPS58208603A (ja) * | 1982-05-31 | 1983-12-05 | Hitachi Ltd | 位置検出方法 |
| JPS62188901A (ja) * | 1987-02-06 | 1987-08-18 | Canon Inc | 光位置検知装置 |
| JPH02194200A (ja) * | 1989-01-20 | 1990-07-31 | Eagle Ind Co Ltd | めっき浴添加剤 |
| CN104749901B (zh) * | 2013-12-31 | 2017-08-29 | 上海微电子装备有限公司 | 一种调焦调平装置 |
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1977
- 1977-08-10 JP JP9506277A patent/JPS5429977A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0628491B2 (ja) * | 1982-10-12 | 1994-04-13 | テレフォンアクチーボラゲット エル エム エリクソン | 充 電 調 整 器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5429977A (en) | 1979-03-06 |