JPS544570A - Production of semiconductor devices - Google Patents

Production of semiconductor devices

Info

Publication number
JPS544570A
JPS544570A JP7013577A JP7013577A JPS544570A JP S544570 A JPS544570 A JP S544570A JP 7013577 A JP7013577 A JP 7013577A JP 7013577 A JP7013577 A JP 7013577A JP S544570 A JPS544570 A JP S544570A
Authority
JP
Japan
Prior art keywords
production
semiconductor devices
spacing
positive
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7013577A
Other languages
Japanese (ja)
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7013577A priority Critical patent/JPS544570A/en
Publication of JPS544570A publication Critical patent/JPS544570A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To make fine patterns with easy by using the spacing of positive and opposite mask patterns formed on a substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP7013577A 1977-06-13 1977-06-13 Production of semiconductor devices Pending JPS544570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7013577A JPS544570A (en) 1977-06-13 1977-06-13 Production of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7013577A JPS544570A (en) 1977-06-13 1977-06-13 Production of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS544570A true JPS544570A (en) 1979-01-13

Family

ID=13422810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7013577A Pending JPS544570A (en) 1977-06-13 1977-06-13 Production of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS544570A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145274A (en) * 1975-05-27 1976-12-14 Fairchild Camera Instr Co Method of manufacturing semiconductor element and structure of semiconductor used in that method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145274A (en) * 1975-05-27 1976-12-14 Fairchild Camera Instr Co Method of manufacturing semiconductor element and structure of semiconductor used in that method

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