JPS5459191A - Method and apparatus for detection of minute leakage - Google Patents

Method and apparatus for detection of minute leakage

Info

Publication number
JPS5459191A
JPS5459191A JP12455577A JP12455577A JPS5459191A JP S5459191 A JPS5459191 A JP S5459191A JP 12455577 A JP12455577 A JP 12455577A JP 12455577 A JP12455577 A JP 12455577A JP S5459191 A JPS5459191 A JP S5459191A
Authority
JP
Japan
Prior art keywords
gas
leakage
detection
detector
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12455577A
Other languages
English (en)
Inventor
Hiroshi Yamaji
Takashi Noguchi
Fumio Ando
Hiroshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12455577A priority Critical patent/JPS5459191A/ja
Publication of JPS5459191A publication Critical patent/JPS5459191A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP12455577A 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage Pending JPS5459191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12455577A JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12455577A JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Publications (1)

Publication Number Publication Date
JPS5459191A true JPS5459191A (en) 1979-05-12

Family

ID=14888371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12455577A Pending JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Country Status (1)

Country Link
JP (1) JPS5459191A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137835A (en) * 1981-02-20 1982-08-25 Hitachi Ltd Leakage detector
US5388446A (en) * 1993-10-18 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for container leakage testing
WO1995027193A1 (fr) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Detecteur de piqures
US5861547A (en) * 1996-08-13 1999-01-19 Daiwa Can Company Apparatus for and method of testing leakage of hollow member

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137835A (en) * 1981-02-20 1982-08-25 Hitachi Ltd Leakage detector
US5388446A (en) * 1993-10-18 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for container leakage testing
WO1995027193A1 (fr) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Detecteur de piqures
US5633454A (en) * 1994-04-04 1997-05-27 Otsuka Pharmaceutical Factory, Inc. Pinhole inspecting apparatus
AU688483B2 (en) * 1994-04-04 1998-03-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector
US5861547A (en) * 1996-08-13 1999-01-19 Daiwa Can Company Apparatus for and method of testing leakage of hollow member

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