JPS54593A - Semiconductor displacement transducer - Google Patents

Semiconductor displacement transducer

Info

Publication number
JPS54593A
JPS54593A JP6473277A JP6473277A JPS54593A JP S54593 A JPS54593 A JP S54593A JP 6473277 A JP6473277 A JP 6473277A JP 6473277 A JP6473277 A JP 6473277A JP S54593 A JPS54593 A JP S54593A
Authority
JP
Japan
Prior art keywords
displacement transducer
strain
semiconductor
insulating film
inducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6473277A
Other languages
English (en)
Inventor
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6473277A priority Critical patent/JPS54593A/ja
Publication of JPS54593A publication Critical patent/JPS54593A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP6473277A 1977-06-03 1977-06-03 Semiconductor displacement transducer Pending JPS54593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6473277A JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6473277A JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Publications (1)

Publication Number Publication Date
JPS54593A true JPS54593A (en) 1979-01-05

Family

ID=13266607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6473277A Pending JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Country Status (1)

Country Link
JP (1) JPS54593A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61248482A (ja) * 1985-04-25 1986-11-05 Nippon Denso Co Ltd 半導体歪検出器
JPH0257811U (ja) * 1988-10-21 1990-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61248482A (ja) * 1985-04-25 1986-11-05 Nippon Denso Co Ltd 半導体歪検出器
JPH0257811U (ja) * 1988-10-21 1990-04-25

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