JPS54593A - Semiconductor displacement transducer - Google Patents

Semiconductor displacement transducer

Info

Publication number
JPS54593A
JPS54593A JP6473277A JP6473277A JPS54593A JP S54593 A JPS54593 A JP S54593A JP 6473277 A JP6473277 A JP 6473277A JP 6473277 A JP6473277 A JP 6473277A JP S54593 A JPS54593 A JP S54593A
Authority
JP
Japan
Prior art keywords
displacement transducer
strain
semiconductor
insulating film
inducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6473277A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6473277A priority Critical patent/JPS54593A/en
Publication of JPS54593A publication Critical patent/JPS54593A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To perfect the insulation with a strain inducer and transmit the strain of the strain inducer accurately to gauge resistances by bonding the semiconductor gauge resistances formed on an insulating film through mutual insulation and isolation to the strain inducer by way of said insulating film and polycrystalline Si layer and further an Au-Si eutectic alloy.
COPYRIGHT: (C)1979,JPO&Japio
JP6473277A 1977-06-03 1977-06-03 Semiconductor displacement transducer Pending JPS54593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6473277A JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6473277A JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Publications (1)

Publication Number Publication Date
JPS54593A true JPS54593A (en) 1979-01-05

Family

ID=13266607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6473277A Pending JPS54593A (en) 1977-06-03 1977-06-03 Semiconductor displacement transducer

Country Status (1)

Country Link
JP (1) JPS54593A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61248482A (en) * 1985-04-25 1986-11-05 Nippon Denso Co Ltd Semiconductor strain detector
JPH0257811U (en) * 1988-10-21 1990-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61248482A (en) * 1985-04-25 1986-11-05 Nippon Denso Co Ltd Semiconductor strain detector
JPH0257811U (en) * 1988-10-21 1990-04-25

Similar Documents

Publication Publication Date Title
JPS5365089A (en) Semiconductor pressure transducer
JPS55103439A (en) Semiconductor pressure sensor
JPS52127257A (en) Displacement converter
JPS5354971A (en) Semiconductor device
JPS54593A (en) Semiconductor displacement transducer
JPS5423484A (en) Semiconductor integrated circuit and its manufacture
JPS57136132A (en) Semiconductor pressure transducer
JPS5212575A (en) Production method of semi-conductor device
JPS5477082A (en) Semiconductor displacement transducer
JPS53119694A (en) Semiconductor pressure transducer
JPS52149992A (en) Pressure transducer
JPS5411690A (en) Semiconductor laser unit
JPS53119693A (en) Semiconductor pressure transducer
JPS5354990A (en) Pressure sensitive device
JPS5348671A (en) Electrode structure of semiconductor element
JPS5314564A (en) Bonding method of s# chip and substrate
JPS53117970A (en) Resin seal type semiconductor device
JPS5315790A (en) Semiconductor strain transducer
JPS5539043A (en) Strain gauge and its adhesion
JPS5432282A (en) Semiconductor pressre conversion unit
JPS5314558A (en) Semiconductor device
JPS5441673A (en) Semiconductor device and its manufacture
JPS5344171A (en) Semiconductor device
JPS53107288A (en) Semiconductor strain transducer
JPS5655807A (en) Displacement converter of semiconductor-bonding type