JPS546458A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS546458A
JPS546458A JP7109577A JP7109577A JPS546458A JP S546458 A JPS546458 A JP S546458A JP 7109577 A JP7109577 A JP 7109577A JP 7109577 A JP7109577 A JP 7109577A JP S546458 A JPS546458 A JP S546458A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
layer
contamination
protecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7109577A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Kazuo Nojiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7109577A priority Critical patent/JPS546458A/en
Publication of JPS546458A publication Critical patent/JPS546458A/en
Pending legal-status Critical Current

Links

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the contamination of a Si substrate due to an etching liquid of hot phosphoric acid, etc., by protecting a N+ layer and P-layer surface by providing an oxidation film under a nitrification film to be selectively etched.
COPYRIGHT: (C)1979,JPO&Japio
JP7109577A 1977-06-17 1977-06-17 Manufacture of semiconductor device Pending JPS546458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7109577A JPS546458A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7109577A JPS546458A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS546458A true JPS546458A (en) 1979-01-18

Family

ID=13450625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7109577A Pending JPS546458A (en) 1977-06-17 1977-06-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS546458A (en)

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