JPS546468A - Alignment, conveyance and fabrication methods for semiconductor element - Google Patents

Alignment, conveyance and fabrication methods for semiconductor element

Info

Publication number
JPS546468A
JPS546468A JP7109677A JP7109677A JPS546468A JP S546468 A JPS546468 A JP S546468A JP 7109677 A JP7109677 A JP 7109677A JP 7109677 A JP7109677 A JP 7109677A JP S546468 A JPS546468 A JP S546468A
Authority
JP
Japan
Prior art keywords
conveyance
alignment
semiconductor element
fabrication methods
fabricate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7109677A
Other languages
English (en)
Inventor
Shinaya Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7109677A priority Critical patent/JPS546468A/ja
Publication of JPS546468A publication Critical patent/JPS546468A/ja
Pending legal-status Critical Current

Links

JP7109677A 1977-06-17 1977-06-17 Alignment, conveyance and fabrication methods for semiconductor element Pending JPS546468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7109677A JPS546468A (en) 1977-06-17 1977-06-17 Alignment, conveyance and fabrication methods for semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7109677A JPS546468A (en) 1977-06-17 1977-06-17 Alignment, conveyance and fabrication methods for semiconductor element

Publications (1)

Publication Number Publication Date
JPS546468A true JPS546468A (en) 1979-01-18

Family

ID=13450655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7109677A Pending JPS546468A (en) 1977-06-17 1977-06-17 Alignment, conveyance and fabrication methods for semiconductor element

Country Status (1)

Country Link
JP (1) JPS546468A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0770581B2 (ja) * 1984-03-22 1995-07-31 エスジーエス―トムソン マイクロエレクトロニクス インコーポレイテッド 集積回路ダイの反転装置
KR100363569B1 (ko) * 2000-12-26 2002-12-05 메카텍스 (주) 반도체소자 검사기의 소자 이송장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0770581B2 (ja) * 1984-03-22 1995-07-31 エスジーエス―トムソン マイクロエレクトロニクス インコーポレイテッド 集積回路ダイの反転装置
KR100363569B1 (ko) * 2000-12-26 2002-12-05 메카텍스 (주) 반도체소자 검사기의 소자 이송장치

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