JPS548968A - Heat-treating method of semiconductor - Google Patents

Heat-treating method of semiconductor

Info

Publication number
JPS548968A
JPS548968A JP7479777A JP7479777A JPS548968A JP S548968 A JPS548968 A JP S548968A JP 7479777 A JP7479777 A JP 7479777A JP 7479777 A JP7479777 A JP 7479777A JP S548968 A JPS548968 A JP S548968A
Authority
JP
Japan
Prior art keywords
semiconductor
heat
treating method
scatterin
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7479777A
Other languages
Japanese (ja)
Other versions
JPS6013299B2 (en
Inventor
Kinzo Tao
Kimio Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7479777A priority Critical patent/JPS6013299B2/en
Publication of JPS548968A publication Critical patent/JPS548968A/en
Publication of JPS6013299B2 publication Critical patent/JPS6013299B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To prevent scatterin a heat treatment by arranging two substrates on a board with their reverse surfaces confronted.
JP7479777A 1977-06-23 1977-06-23 Heat treatment method for semiconductor devices Expired JPS6013299B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7479777A JPS6013299B2 (en) 1977-06-23 1977-06-23 Heat treatment method for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7479777A JPS6013299B2 (en) 1977-06-23 1977-06-23 Heat treatment method for semiconductor devices

Publications (2)

Publication Number Publication Date
JPS548968A true JPS548968A (en) 1979-01-23
JPS6013299B2 JPS6013299B2 (en) 1985-04-06

Family

ID=13557646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7479777A Expired JPS6013299B2 (en) 1977-06-23 1977-06-23 Heat treatment method for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS6013299B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223606U (en) * 1988-08-01 1990-02-16
JPH04321221A (en) * 1991-04-20 1992-11-11 Komatsu Electron Metals Co Ltd Diffusion of semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223606U (en) * 1988-08-01 1990-02-16
JPH04321221A (en) * 1991-04-20 1992-11-11 Komatsu Electron Metals Co Ltd Diffusion of semiconductor wafer

Also Published As

Publication number Publication date
JPS6013299B2 (en) 1985-04-06

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