JPS5510585A - Diaphragm for pressure detector - Google Patents

Diaphragm for pressure detector

Info

Publication number
JPS5510585A
JPS5510585A JP8449078A JP8449078A JPS5510585A JP S5510585 A JPS5510585 A JP S5510585A JP 8449078 A JP8449078 A JP 8449078A JP 8449078 A JP8449078 A JP 8449078A JP S5510585 A JPS5510585 A JP S5510585A
Authority
JP
Japan
Prior art keywords
diaphragm
outer circumference
thickness
strain gauge
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8449078A
Other languages
Japanese (ja)
Inventor
Shuji Amakasu
Toshiyuki Arai
Seiichiro Yamashita
Noboru Onishi
Seiji Kitabori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8449078A priority Critical patent/JPS5510585A/en
Publication of JPS5510585A publication Critical patent/JPS5510585A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To secure a high-accuracy detection of the pressure by providing the large-thickness inner frame between the outer circumference attachment part and the center part where the strain gauge is provided. CONSTITUTION:Inner frame 13 featuring a thickness of 5 times as large as that of diaphragm part 12 is provided at the outer circumference of part 12 including strain gauge part 11, and furthermore part 14 featuring a thickness about equal to or smaller than diaphragm part 12 is provided around frame 13. Thus the outer circumference area of part 14 is used as attachment part 16 to substrate 15. As frame 13 features a higher rigidity than part 14, the external mechanical strain, the thermal strain and others are never given directly to strain gauge part 11.
JP8449078A 1978-07-10 1978-07-10 Diaphragm for pressure detector Pending JPS5510585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8449078A JPS5510585A (en) 1978-07-10 1978-07-10 Diaphragm for pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8449078A JPS5510585A (en) 1978-07-10 1978-07-10 Diaphragm for pressure detector

Publications (1)

Publication Number Publication Date
JPS5510585A true JPS5510585A (en) 1980-01-25

Family

ID=13832087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8449078A Pending JPS5510585A (en) 1978-07-10 1978-07-10 Diaphragm for pressure detector

Country Status (1)

Country Link
JP (1) JPS5510585A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607046U (en) * 1983-06-28 1985-01-18 株式会社フジクラ semiconductor pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607046U (en) * 1983-06-28 1985-01-18 株式会社フジクラ semiconductor pressure sensor

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