JPS55128238A - Electron lens device - Google Patents
Electron lens deviceInfo
- Publication number
- JPS55128238A JPS55128238A JP3554379A JP3554379A JPS55128238A JP S55128238 A JPS55128238 A JP S55128238A JP 3554379 A JP3554379 A JP 3554379A JP 3554379 A JP3554379 A JP 3554379A JP S55128238 A JPS55128238 A JP S55128238A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- lens
- lenses
- stages
- narrowly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve vacuum exhaust characteristic of the device without worsening characteristics in the electron lens system, by arranging at least one of the lenses in a plurality of stages in the periphery of a hollow conductor and forming an exposure surface area as narrowly in the vacuum as possible.
CONSTITUTION: Condenser lenses C1WC3 in a plurality of stages are provided in an outer cylinder 7. Only the lens C1 is exposed in the vacuum. The lenses C2, C3 are arranged out of the vacuum by sealing both ends of a hollow metallic conductor 12 with O-rings 10, 11. For the hollow metallic conductor 12 is used a thin-thickness pipe made of SUS, phosphorus bronze. For the C1 lens the hole diameter of which is smaller than the diameter of the thin-thickness pipe 12, an O-ring 9 is arranged in the gap between upper and lower magnetic poles through a guide ring 8 to cause the lens to endure the vacuum, thus to provide a surface area as narrowly exposed in the vacuum as possible. In this way, residual gas molecule can be reduced thus to improve the vacuum exhaust characteristic.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3554379A JPS55128238A (en) | 1979-03-28 | 1979-03-28 | Electron lens device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3554379A JPS55128238A (en) | 1979-03-28 | 1979-03-28 | Electron lens device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55128238A true JPS55128238A (en) | 1980-10-03 |
Family
ID=12444634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3554379A Pending JPS55128238A (en) | 1979-03-28 | 1979-03-28 | Electron lens device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55128238A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004019835B4 (en) * | 2004-04-23 | 2007-08-02 | Vistec Electron Beam Gmbh | Illumination condenser for a particle-optical projection system |
-
1979
- 1979-03-28 JP JP3554379A patent/JPS55128238A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004019835B4 (en) * | 2004-04-23 | 2007-08-02 | Vistec Electron Beam Gmbh | Illumination condenser for a particle-optical projection system |
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