JPS55145352A - Fabricating method of semiconductor chip - Google Patents
Fabricating method of semiconductor chipInfo
- Publication number
- JPS55145352A JPS55145352A JP5237779A JP5237779A JPS55145352A JP S55145352 A JPS55145352 A JP S55145352A JP 5237779 A JP5237779 A JP 5237779A JP 5237779 A JP5237779 A JP 5237779A JP S55145352 A JPS55145352 A JP S55145352A
- Authority
- JP
- Japan
- Prior art keywords
- chips
- recesses
- wax
- semiconductor chip
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
Landscapes
- Weting (AREA)
- Dicing (AREA)
Abstract
PURPOSE:To fully automate the fabrication of a diode chip or the like by containing and conveying divided semiconductor chips while regularly aligning the chips to eliminate the necessity of checking or realigning the aligned chips by a manual work. CONSTITUTION:A semiconductor wafer 2 is adhered via wax 3 on a supporting plate 1, and divided into independent chips 2a-2e. Then, the recesses 4a-4c of a transparent retainer tool 4 having holes at the bottom as formed responsive to the chips 2a-2e are so brought oppositely into contact at the recesses 4a-4c with the chips 2a-2e, respectively. Thereafter, the wax 3 is molten and removed in this contacted state to accommodate the respective chips in the recesses for holding the separated chips.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5237779A JPS55145352A (en) | 1979-04-27 | 1979-04-27 | Fabricating method of semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5237779A JPS55145352A (en) | 1979-04-27 | 1979-04-27 | Fabricating method of semiconductor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55145352A true JPS55145352A (en) | 1980-11-12 |
Family
ID=12913106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5237779A Pending JPS55145352A (en) | 1979-04-27 | 1979-04-27 | Fabricating method of semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55145352A (en) |
-
1979
- 1979-04-27 JP JP5237779A patent/JPS55145352A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1053383A (en) | Semiconductor wafer dicing fixture | |
| DE3562070D1 (en) | Process for bonding superalloy work pieces by diffusion | |
| ATE373872T1 (en) | CUTTING CONTAINER AND METHOD FOR CUTTING BANDLESS SUBSTRATES | |
| CA2231852A1 (en) | Substrate processing apparatus and method | |
| KR880701459A (en) | Planner process for forming bias on silicon wafer | |
| DE2966008D1 (en) | Device for the precise alignment of planar workpieces, e.g. semiconductor wafers | |
| MY108895A (en) | Method for extending wafer-supporting sheet | |
| JPS56140632A (en) | Method for giving strain to semiconductor wafer | |
| JPS55145353A (en) | Fabricating method of semiconductor chip | |
| JPS6461031A (en) | Device for mounting chip | |
| JPS57210641A (en) | Supporting structure for wafer | |
| JPS57143844A (en) | Chip composition of wafer | |
| JPS51111993A (en) | Apparatus for fabricating thin work as semiconductor or the like | |
| DE69013065D1 (en) | Process for polishing semiconductor wafers. | |
| JPS6459231A (en) | Mask layout method for semiconductor integrated circuit | |
| JPS5758332A (en) | Manufacture of semiconductor device | |
| JPS57147241A (en) | Bonding method for crystal wafer | |
| JPS54134553A (en) | Wafer holding tool | |
| GB2156153B (en) | Alignment process for semiconductor chips | |
| JPS5410670A (en) | Bonding method of semiconductor chips | |
| JPS6476728A (en) | Method of securing semiconductor element | |
| JPS545380A (en) | Impurity introducing method for semiconductor wafer and its jig | |
| SU1069981A2 (en) | Method of manufacturing diamond drilling tool | |
| JPS57106132A (en) | Manufacture of semiconductor device | |
| JPS5375866A (en) | Wafer transfer device |