JPS55160421A - Method and device for thin film growth - Google Patents
Method and device for thin film growthInfo
- Publication number
- JPS55160421A JPS55160421A JP6842679A JP6842679A JPS55160421A JP S55160421 A JPS55160421 A JP S55160421A JP 6842679 A JP6842679 A JP 6842679A JP 6842679 A JP6842679 A JP 6842679A JP S55160421 A JPS55160421 A JP S55160421A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- molecular beam
- thin film
- room
- prepared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6842679A JPS55160421A (en) | 1979-05-31 | 1979-05-31 | Method and device for thin film growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6842679A JPS55160421A (en) | 1979-05-31 | 1979-05-31 | Method and device for thin film growth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55160421A true JPS55160421A (en) | 1980-12-13 |
| JPS63937B2 JPS63937B2 (2) | 1988-01-09 |
Family
ID=13373345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6842679A Granted JPS55160421A (en) | 1979-05-31 | 1979-05-31 | Method and device for thin film growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55160421A (2) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625631A (ja) * | 1985-07-02 | 1987-01-12 | Fujitsu Ltd | 分子線結晶成長装置及び分子線結晶成長方法 |
| WO1987000966A1 (en) * | 1985-08-07 | 1987-02-12 | The Commonwealth Of Australia | Control of uniformity of growing alloy film |
| AU592110B2 (en) * | 1985-08-07 | 1990-01-04 | Commonwealth Of Australia, The | Control of uniformity of growing alloy film |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132977A (en) * | 1975-05-14 | 1976-11-18 | Matsushita Electric Ind Co Ltd | Junction-type field effect transistor process |
-
1979
- 1979-05-31 JP JP6842679A patent/JPS55160421A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51132977A (en) * | 1975-05-14 | 1976-11-18 | Matsushita Electric Ind Co Ltd | Junction-type field effect transistor process |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS625631A (ja) * | 1985-07-02 | 1987-01-12 | Fujitsu Ltd | 分子線結晶成長装置及び分子線結晶成長方法 |
| WO1987000966A1 (en) * | 1985-08-07 | 1987-02-12 | The Commonwealth Of Australia | Control of uniformity of growing alloy film |
| US4770895A (en) * | 1985-08-07 | 1988-09-13 | The Commonwealth Of Australia | Control of uniformity of growing alloy film |
| AU592110B2 (en) * | 1985-08-07 | 1990-01-04 | Commonwealth Of Australia, The | Control of uniformity of growing alloy film |
| US4934313A (en) * | 1985-08-07 | 1990-06-19 | Commonwealth Of Australia | Control of uniformity of growing alloy film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63937B2 (2) | 1988-01-09 |
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