JPS5519146U - - Google Patents
Info
- Publication number
- JPS5519146U JPS5519146U JP10112478U JP10112478U JPS5519146U JP S5519146 U JPS5519146 U JP S5519146U JP 10112478 U JP10112478 U JP 10112478U JP 10112478 U JP10112478 U JP 10112478U JP S5519146 U JPS5519146 U JP S5519146U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10112478U JPS5812827Y2 (ja) | 1978-07-21 | 1978-07-21 | 気相成長用飽和器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10112478U JPS5812827Y2 (ja) | 1978-07-21 | 1978-07-21 | 気相成長用飽和器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5519146U true JPS5519146U (de) | 1980-02-06 |
| JPS5812827Y2 JPS5812827Y2 (ja) | 1983-03-11 |
Family
ID=29039470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10112478U Expired JPS5812827Y2 (ja) | 1978-07-21 | 1978-07-21 | 気相成長用飽和器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812827Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131973A (ja) * | 1983-12-19 | 1985-07-13 | Matsushita Electric Ind Co Ltd | 有機金属の気化方法 |
-
1978
- 1978-07-21 JP JP10112478U patent/JPS5812827Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131973A (ja) * | 1983-12-19 | 1985-07-13 | Matsushita Electric Ind Co Ltd | 有機金属の気化方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5812827Y2 (ja) | 1983-03-11 |