JPS5812827Y2 - 気相成長用飽和器 - Google Patents

気相成長用飽和器

Info

Publication number
JPS5812827Y2
JPS5812827Y2 JP10112478U JP10112478U JPS5812827Y2 JP S5812827 Y2 JPS5812827 Y2 JP S5812827Y2 JP 10112478 U JP10112478 U JP 10112478U JP 10112478 U JP10112478 U JP 10112478U JP S5812827 Y2 JPS5812827 Y2 JP S5812827Y2
Authority
JP
Japan
Prior art keywords
saturator
vapor phase
phase growth
container
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10112478U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5519146U (de
Inventor
楝田敬明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10112478U priority Critical patent/JPS5812827Y2/ja
Publication of JPS5519146U publication Critical patent/JPS5519146U/ja
Application granted granted Critical
Publication of JPS5812827Y2 publication Critical patent/JPS5812827Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP10112478U 1978-07-21 1978-07-21 気相成長用飽和器 Expired JPS5812827Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10112478U JPS5812827Y2 (ja) 1978-07-21 1978-07-21 気相成長用飽和器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10112478U JPS5812827Y2 (ja) 1978-07-21 1978-07-21 気相成長用飽和器

Publications (2)

Publication Number Publication Date
JPS5519146U JPS5519146U (de) 1980-02-06
JPS5812827Y2 true JPS5812827Y2 (ja) 1983-03-11

Family

ID=29039470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10112478U Expired JPS5812827Y2 (ja) 1978-07-21 1978-07-21 気相成長用飽和器

Country Status (1)

Country Link
JP (1) JPS5812827Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60131973A (ja) * 1983-12-19 1985-07-13 Matsushita Electric Ind Co Ltd 有機金属の気化方法

Also Published As

Publication number Publication date
JPS5519146U (de) 1980-02-06

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