JPS553214A - Elastic surface wave device - Google Patents

Elastic surface wave device

Info

Publication number
JPS553214A
JPS553214A JP7536978A JP7536978A JPS553214A JP S553214 A JPS553214 A JP S553214A JP 7536978 A JP7536978 A JP 7536978A JP 7536978 A JP7536978 A JP 7536978A JP S553214 A JPS553214 A JP S553214A
Authority
JP
Japan
Prior art keywords
film thickness
surface wave
elastic surface
substrate
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7536978A
Other languages
Japanese (ja)
Other versions
JPS6141449B2 (en
Inventor
Hisao Yamauchi
Sakichi Ashida
Takeshi Hazama
Akitsuna Nukuhara
Hiroyuki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7536978A priority Critical patent/JPS553214A/en
Publication of JPS553214A publication Critical patent/JPS553214A/en
Publication of JPS6141449B2 publication Critical patent/JPS6141449B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To minimize the frequency dispersion for the propagatin velocity of the elastic wave by using the X-cut lithium tantalate (LiTaO3) of the excellent temperature characteristics for the substrate and then selecting properly the film thickness of the electrode material Al. CONSTITUTION:In the case of the comb-line filter, for instance, the X-cut LiTaO3 is used for substrate 21, and roller-screen type electrodes 23-25 are formed with Al on the surface of the substrate via the normal photolithography method. The film thickness of the Al is set so that product of film thickness h of Al and frequency k of the elastic surface wave may be within 0.01-0.2 or 0.8-1.9. Elastic surface wave 22 is propagated preferably in the direction featuring angles 100 deg.- 150 deg. from the Y axis, and 112 deg. is given to the filter shown in the figure.
JP7536978A 1978-06-23 1978-06-23 Elastic surface wave device Granted JPS553214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7536978A JPS553214A (en) 1978-06-23 1978-06-23 Elastic surface wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7536978A JPS553214A (en) 1978-06-23 1978-06-23 Elastic surface wave device

Publications (2)

Publication Number Publication Date
JPS553214A true JPS553214A (en) 1980-01-11
JPS6141449B2 JPS6141449B2 (en) 1986-09-16

Family

ID=13574226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7536978A Granted JPS553214A (en) 1978-06-23 1978-06-23 Elastic surface wave device

Country Status (1)

Country Link
JP (1) JPS553214A (en)

Also Published As

Publication number Publication date
JPS6141449B2 (en) 1986-09-16

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