JPS553214A - Elastic surface wave device - Google Patents
Elastic surface wave deviceInfo
- Publication number
- JPS553214A JPS553214A JP7536978A JP7536978A JPS553214A JP S553214 A JPS553214 A JP S553214A JP 7536978 A JP7536978 A JP 7536978A JP 7536978 A JP7536978 A JP 7536978A JP S553214 A JPS553214 A JP S553214A
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- surface wave
- elastic surface
- substrate
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 229910012463 LiTaO3 Inorganic materials 0.000 abstract 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 239000007772 electrode material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 abstract 1
- 230000000644 propagated effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536978A JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7536978A JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS553214A true JPS553214A (en) | 1980-01-11 |
| JPS6141449B2 JPS6141449B2 (ja) | 1986-09-16 |
Family
ID=13574226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7536978A Granted JPS553214A (en) | 1978-06-23 | 1978-06-23 | Elastic surface wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553214A (ja) |
-
1978
- 1978-06-23 JP JP7536978A patent/JPS553214A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6141449B2 (ja) | 1986-09-16 |
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