JPS5538032A - Method of setting inspection region - Google Patents

Method of setting inspection region

Info

Publication number
JPS5538032A
JPS5538032A JP11078278A JP11078278A JPS5538032A JP S5538032 A JPS5538032 A JP S5538032A JP 11078278 A JP11078278 A JP 11078278A JP 11078278 A JP11078278 A JP 11078278A JP S5538032 A JPS5538032 A JP S5538032A
Authority
JP
Japan
Prior art keywords
data
regions
inspected
setting
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11078278A
Other languages
Japanese (ja)
Inventor
Haruo Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11078278A priority Critical patent/JPS5538032A/en
Publication of JPS5538032A publication Critical patent/JPS5538032A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To simplify region setting, in inspecting various types of semiconductor pellets, by dividing the inspecting field of view into picture elements, assigning them addresses, operating data processing, and setting inspection regions corresponding to the sizes of pellets.
CONSTITUTION: The inspecting field of view is divided lengthwise and crosswise into picture elements, to which addresses are assigned. A predetermined value is set for each address corresponding to the size of the object to be inspected with the object of setting a region where data is ineffective. At the time of detecting, the reference value selectively set corresponding to the size of the object to be inspected is compared with the set value for each address to be detected successively; and the data on the object to be inspected corresponding to the data region is processed, and regions where the data is effective are separated from regions where the data is ineffective. By this, the range of inspection regions is set. Since binary-valued data is used in this way, it is possible to set inspection regions easily and accurately.
COPYRIGHT: (C)1980,JPO&Japio
JP11078278A 1978-09-11 1978-09-11 Method of setting inspection region Pending JPS5538032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11078278A JPS5538032A (en) 1978-09-11 1978-09-11 Method of setting inspection region

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11078278A JPS5538032A (en) 1978-09-11 1978-09-11 Method of setting inspection region

Publications (1)

Publication Number Publication Date
JPS5538032A true JPS5538032A (en) 1980-03-17

Family

ID=14544470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11078278A Pending JPS5538032A (en) 1978-09-11 1978-09-11 Method of setting inspection region

Country Status (1)

Country Link
JP (1) JPS5538032A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6369244A (en) * 1986-09-10 1988-03-29 Hitachi Electronics Eng Co Ltd Forming matter insupecting device
JPS63127546A (en) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd Data processing method for defect of face plate by virtual radius setting

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6369244A (en) * 1986-09-10 1988-03-29 Hitachi Electronics Eng Co Ltd Forming matter insupecting device
JPS63127546A (en) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd Data processing method for defect of face plate by virtual radius setting

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