JPS5547785A - Filter forming method for color solidstate image pickup unit - Google Patents
Filter forming method for color solidstate image pickup unitInfo
- Publication number
- JPS5547785A JPS5547785A JP12714079A JP12714079A JPS5547785A JP S5547785 A JPS5547785 A JP S5547785A JP 12714079 A JP12714079 A JP 12714079A JP 12714079 A JP12714079 A JP 12714079A JP S5547785 A JPS5547785 A JP S5547785A
- Authority
- JP
- Japan
- Prior art keywords
- insulation layer
- layer
- mask
- flat
- photo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Filters (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
PURPOSE: To directly form multi-layer interference film via the mask, on the pickup section on which the circuits including the photo sensing element group and peripheral circuit required for scanning or transfer are integrated.
CONSTITUTION: On the semiconductor substrate 10, the first layer of insulation layer 11 is formed, the transfer electrode 5 is formed on it, and the second layer of insulation layer is formed further on it so that the photo sensing element plane can be flat. The transfer electrode 5 is formed in the insulation layer 11 of which surface is flat, and the pluses ϕV1 and ϕV2 are fed from the clock generator 6. The stripe shape color filter 4 is directly formed on the insulation layer 11 so that the photo conduction elements R, G, B can completely cover the corresponding photo sensitive elements, on the insulation layer 11. The color filter 4 aligns the mask on the flat insulation layer, the film such as ZnS, CeO2, or MgF2 is sequentially laminated through the mask with vacuum evaporation to form the filter consisting of multi- layer interference films.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12714079A JPS5547785A (en) | 1979-10-01 | 1979-10-01 | Filter forming method for color solidstate image pickup unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12714079A JPS5547785A (en) | 1979-10-01 | 1979-10-01 | Filter forming method for color solidstate image pickup unit |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11351574A Division JPS5511036B2 (en) | 1974-09-30 | 1974-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5547785A true JPS5547785A (en) | 1980-04-04 |
Family
ID=14952599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12714079A Pending JPS5547785A (en) | 1979-10-01 | 1979-10-01 | Filter forming method for color solidstate image pickup unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547785A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6310105A (en) * | 1986-07-02 | 1988-01-16 | Fuji Photo Optical Co Ltd | Manufacture of color separation filter |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847216A (en) * | 1971-10-15 | 1973-07-05 | ||
| US3836409A (en) * | 1972-12-07 | 1974-09-17 | Fairchild Camera Instr Co | Uniplanar ccd structure and method |
-
1979
- 1979-10-01 JP JP12714079A patent/JPS5547785A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847216A (en) * | 1971-10-15 | 1973-07-05 | ||
| US3836409A (en) * | 1972-12-07 | 1974-09-17 | Fairchild Camera Instr Co | Uniplanar ccd structure and method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6310105A (en) * | 1986-07-02 | 1988-01-16 | Fuji Photo Optical Co Ltd | Manufacture of color separation filter |
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