JPS5547785A - Filter forming method for color solidstate image pickup unit - Google Patents

Filter forming method for color solidstate image pickup unit

Info

Publication number
JPS5547785A
JPS5547785A JP12714079A JP12714079A JPS5547785A JP S5547785 A JPS5547785 A JP S5547785A JP 12714079 A JP12714079 A JP 12714079A JP 12714079 A JP12714079 A JP 12714079A JP S5547785 A JPS5547785 A JP S5547785A
Authority
JP
Japan
Prior art keywords
insulation layer
layer
mask
flat
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12714079A
Other languages
Japanese (ja)
Inventor
Yoshio Oota
Ryuhei Nakabe
Toshiro Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12714079A priority Critical patent/JPS5547785A/en
Publication of JPS5547785A publication Critical patent/JPS5547785A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE: To directly form multi-layer interference film via the mask, on the pickup section on which the circuits including the photo sensing element group and peripheral circuit required for scanning or transfer are integrated.
CONSTITUTION: On the semiconductor substrate 10, the first layer of insulation layer 11 is formed, the transfer electrode 5 is formed on it, and the second layer of insulation layer is formed further on it so that the photo sensing element plane can be flat. The transfer electrode 5 is formed in the insulation layer 11 of which surface is flat, and the pluses ϕV1 and ϕV2 are fed from the clock generator 6. The stripe shape color filter 4 is directly formed on the insulation layer 11 so that the photo conduction elements R, G, B can completely cover the corresponding photo sensitive elements, on the insulation layer 11. The color filter 4 aligns the mask on the flat insulation layer, the film such as ZnS, CeO2, or MgF2 is sequentially laminated through the mask with vacuum evaporation to form the filter consisting of multi- layer interference films.
COPYRIGHT: (C)1980,JPO&Japio
JP12714079A 1979-10-01 1979-10-01 Filter forming method for color solidstate image pickup unit Pending JPS5547785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12714079A JPS5547785A (en) 1979-10-01 1979-10-01 Filter forming method for color solidstate image pickup unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12714079A JPS5547785A (en) 1979-10-01 1979-10-01 Filter forming method for color solidstate image pickup unit

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11351574A Division JPS5511036B2 (en) 1974-09-30 1974-09-30

Publications (1)

Publication Number Publication Date
JPS5547785A true JPS5547785A (en) 1980-04-04

Family

ID=14952599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12714079A Pending JPS5547785A (en) 1979-10-01 1979-10-01 Filter forming method for color solidstate image pickup unit

Country Status (1)

Country Link
JP (1) JPS5547785A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6310105A (en) * 1986-07-02 1988-01-16 Fuji Photo Optical Co Ltd Manufacture of color separation filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847216A (en) * 1971-10-15 1973-07-05
US3836409A (en) * 1972-12-07 1974-09-17 Fairchild Camera Instr Co Uniplanar ccd structure and method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4847216A (en) * 1971-10-15 1973-07-05
US3836409A (en) * 1972-12-07 1974-09-17 Fairchild Camera Instr Co Uniplanar ccd structure and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6310105A (en) * 1986-07-02 1988-01-16 Fuji Photo Optical Co Ltd Manufacture of color separation filter

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