JPS556364A - Production of nd filter - Google Patents
Production of nd filterInfo
- Publication number
- JPS556364A JPS556364A JP7894178A JP7894178A JPS556364A JP S556364 A JPS556364 A JP S556364A JP 7894178 A JP7894178 A JP 7894178A JP 7894178 A JP7894178 A JP 7894178A JP S556364 A JPS556364 A JP S556364A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- substrate
- metal plates
- metal plate
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 abstract 11
- 239000000758 substrate Substances 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 150000001768 cations Chemical class 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
Abstract
PURPOSE: To prolong thin film forming time, make possible controlling within a delicate range of thin film formation and increase adhesion strength to substrate by disposing the substrate on the outer side of opposing electrodes within a vacuum chamber sealed with low pressure gas.
CONSTITUTION: The inside of a vacuum chamber 1 is evacuated through conduit 2 and inert gas such as argon gas is sealed under low pressure. Metal plates 4 and 5 having no wavelength selective absorption in a visible region are opposedly disposed perpendicularly parallel by leaving a specified spacing in the vacuum chamber 1. A metal plate 7 of the same kind as the metal plates 4, 5 is disposed above the metal plates 4, 5 in proximity to their intermediate. To the bottom face thereof is bonded a substrate 8 of a smaller area than the metal plate 7 which becomes the blank for the ND filter. Discharge is caused between the metal plates 4, 5 by connecting the metal plate 7 to the negative electrode side of a DC variable power source 9 and connecting a high voltage power source 6 to the metal plates 4, 5, thereby allowing cations to be formed from the gas. The cations, accelerated by the electric field between the metal electrodes 4 and 5, impinge vigorously against the surface of the metal plate on one side and the atoms of the metal driven out deposit on the surface of the substrate 8.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7894178A JPS556364A (en) | 1978-06-29 | 1978-06-29 | Production of nd filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7894178A JPS556364A (en) | 1978-06-29 | 1978-06-29 | Production of nd filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS556364A true JPS556364A (en) | 1980-01-17 |
Family
ID=13675900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7894178A Pending JPS556364A (en) | 1978-06-29 | 1978-06-29 | Production of nd filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS556364A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59159426U (en) * | 1983-04-11 | 1984-10-25 | 埼玉化工株式会社 | Gum pine surgical device |
| JPS6182705A (en) * | 1984-09-28 | 1986-04-26 | 株式会社東芝 | Electromotive toothbrush |
-
1978
- 1978-06-29 JP JP7894178A patent/JPS556364A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59159426U (en) * | 1983-04-11 | 1984-10-25 | 埼玉化工株式会社 | Gum pine surgical device |
| JPS6182705A (en) * | 1984-09-28 | 1986-04-26 | 株式会社東芝 | Electromotive toothbrush |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FR2412619B1 (en) | ||
| US20100187093A1 (en) | Sputtering target, method of manufacturing thin film, and display device | |
| GB1484618A (en) | Making display devices | |
| JPS5749219A (en) | Forming method for ionized thin film without necessity of direct gas plasma | |
| JPS5745339A (en) | Production of deposited film | |
| JPS56130466A (en) | Film forming method | |
| JPS57161057A (en) | Chemical vapor phase growth device using plasma | |
| JPS5435178A (en) | Ultrafine particle depositing apparatus | |
| JPS56121629A (en) | Film forming method | |
| JPS57143827A (en) | Parallel, flat electrode | |
| JPS5916975A (en) | sputtering equipment | |
| JPS5486483A (en) | Sputtering method and apparatus | |
| JPH03123022A (en) | Plasma film forming device | |
| JPS578441A (en) | Production of ion selective electrode | |
| JPS5591971A (en) | Thin film forming method | |
| EP1122337A3 (en) | Apparatus and method for forming deposited film | |
| JPS5917193B2 (en) | sputtering equipment | |
| JPS52122284A (en) | Sputtering device having bias electrode | |
| JPS56160652A (en) | Manufacture of glass sensitive film of glass electrode | |
| JPS56134729A (en) | Production of thin film by sputtering | |
| JPS5712424A (en) | Production of magnetic recorder | |
| JPS5685877A (en) | Treatment of amorphous semiconductor film | |
| JPS56148833A (en) | Plasma etching method | |
| JPS56122122A (en) | Manufacture of amorphous semiconductor | |
| SU1494559A1 (en) | Method of manufacturing target for vacuum spraying |