JPS578441A - Production of ion selective electrode - Google Patents

Production of ion selective electrode

Info

Publication number
JPS578441A
JPS578441A JP8324880A JP8324880A JPS578441A JP S578441 A JPS578441 A JP S578441A JP 8324880 A JP8324880 A JP 8324880A JP 8324880 A JP8324880 A JP 8324880A JP S578441 A JPS578441 A JP S578441A
Authority
JP
Japan
Prior art keywords
substrate
target
sputtered
gas
inductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8324880A
Other languages
Japanese (ja)
Inventor
Koichi Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8324880A priority Critical patent/JPS578441A/en
Publication of JPS578441A publication Critical patent/JPS578441A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/333—Ion-selective electrodes or membranes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To produce an inductive film having the uniform and stable thickness with good reproducibility, by sputtering a target composed of crystalline material and forming the inductive film on the surface of sputtered substrate. CONSTITUTION:A target 3 composed of crystalline material is attached on a target electrode 2 in a vacuum vessel 1 of a sputtering apparatus, and a substrate 5 to be sputtered is attached on a holder 4 of the substrate to be sputtered. Then, pressure of the vessel 1 is reduced by a vacuum pump and is brought near a vacuum. An inert gas or reactive gas or mixed gas is introduced to a degree of 10<-2>-10<-3> Torr. and introduced gas is ionized by applying an electric field between the target 3 and substrate 5 by a high frequency power source 6. Charged particles in plasma collide against the surface of the target 3 and atoms and molecules on the surface are sprung out. Said atoms and molecules are stuck to the surface of the sputtered substrate 5 and an inductive film 7 is formed on the substrate 5. An ion selective electrode is produced by attaching a lead wire 8 and hardening by a resin 9.
JP8324880A 1980-06-18 1980-06-18 Production of ion selective electrode Pending JPS578441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8324880A JPS578441A (en) 1980-06-18 1980-06-18 Production of ion selective electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8324880A JPS578441A (en) 1980-06-18 1980-06-18 Production of ion selective electrode

Publications (1)

Publication Number Publication Date
JPS578441A true JPS578441A (en) 1982-01-16

Family

ID=13797023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8324880A Pending JPS578441A (en) 1980-06-18 1980-06-18 Production of ion selective electrode

Country Status (1)

Country Link
JP (1) JPS578441A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973728U (en) * 1982-11-10 1984-05-18 キヤノン株式会社 flashlight device
JPS62118304A (en) * 1985-11-18 1987-05-29 Asahi Optical Co Ltd Fresnel lens

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197491A (en) * 1975-01-24 1976-08-27 **************** ***te*******ni*no*******te*****chi***ne***************ka***ko**

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197491A (en) * 1975-01-24 1976-08-27 **************** ***te*******ni*no*******te*****chi***ne***************ka***ko**

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973728U (en) * 1982-11-10 1984-05-18 キヤノン株式会社 flashlight device
JPS62118304A (en) * 1985-11-18 1987-05-29 Asahi Optical Co Ltd Fresnel lens

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