JPS556784A - Method and device for astrigmatism correction in scanning electron microscope - Google Patents

Method and device for astrigmatism correction in scanning electron microscope

Info

Publication number
JPS556784A
JPS556784A JP3644579A JP3644579A JPS556784A JP S556784 A JPS556784 A JP S556784A JP 3644579 A JP3644579 A JP 3644579A JP 3644579 A JP3644579 A JP 3644579A JP S556784 A JPS556784 A JP S556784A
Authority
JP
Japan
Prior art keywords
astigmatism
blur circle
corrected
operated
astrigmatism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3644579A
Other languages
Japanese (ja)
Other versions
JPS6151377B2 (en
Inventor
Takashi Namae
Teruo Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3644579A priority Critical patent/JPS556784A/en
Publication of JPS556784A publication Critical patent/JPS556784A/en
Publication of JPS6151377B2 publication Critical patent/JPS6151377B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To correct an astigmatism automatically by operating the means which regulates correcting current in the x- and y-directions independently in the electromagnetic astigmatism correcting device incorporated in the image formation lens system when an influence caused by an astigmatism is recognized in the scanning image during observation.
CONSTITUTION: When the principal plane of lens passes through the intersection of x and y axes, the focal lines C and E are formed in the focal planes in the x- and y- directions respectively, the minimum blur circle D is formed between both focal lines C and E. The point of D corresponds to the position of focus when the astigmatism is corrected. The interval between C and E is the astigmatism difference Δ. In the state the minumum blur circle is present, two pairs of four-electrode lenses of the astigmatism correcting device are independently operated, δ'(diameter of the minimum blur circle) is controlled so that it becomes the least value sequentially. By this way, ΔF'(composite astigmatism vector when the device is operated) can be made zero, that is, δ' can be done zero, the astigmatism can completely be corrected.
COPYRIGHT: (C)1980,JPO&Japio
JP3644579A 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope Granted JPS556784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3644579A JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3644579A JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15779077A Division JPS5492050A (en) 1977-12-29 1977-12-29 Method and apparatus for astigmatic correction of scanning electronic microscope and others

Publications (2)

Publication Number Publication Date
JPS556784A true JPS556784A (en) 1980-01-18
JPS6151377B2 JPS6151377B2 (en) 1986-11-08

Family

ID=12470000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3644579A Granted JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS556784A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS58207561A (en) * 1982-05-27 1983-12-03 Honda Motor Co Ltd Automatic speed change pulley

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006104193A1 (en) * 2005-03-29 2008-09-11 パイオニア株式会社 Astigmatism adjustment method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (en) * 1971-09-06 1973-05-18
JPS50141261A (en) * 1974-04-24 1975-11-13
JPS5218161A (en) * 1975-08-01 1977-02-10 Hitachi Ltd Sample scan type sample image display unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (en) * 1971-09-06 1973-05-18
JPS50141261A (en) * 1974-04-24 1975-11-13
JPS5218161A (en) * 1975-08-01 1977-02-10 Hitachi Ltd Sample scan type sample image display unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS58207561A (en) * 1982-05-27 1983-12-03 Honda Motor Co Ltd Automatic speed change pulley

Also Published As

Publication number Publication date
JPS6151377B2 (en) 1986-11-08

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