JPS5572811A - Pattern check unit - Google Patents

Pattern check unit

Info

Publication number
JPS5572811A
JPS5572811A JP14687078A JP14687078A JPS5572811A JP S5572811 A JPS5572811 A JP S5572811A JP 14687078 A JP14687078 A JP 14687078A JP 14687078 A JP14687078 A JP 14687078A JP S5572811 A JPS5572811 A JP S5572811A
Authority
JP
Japan
Prior art keywords
data
register
pattern
stored
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14687078A
Other languages
English (en)
Inventor
Kikuo Mita
Masayuki Oyama
Taku Yoshida
Masahito Nakajima
Katsumi Fujiwara
Tadao Nakakuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14687078A priority Critical patent/JPS5572811A/ja
Priority to US06/197,345 priority patent/US4392120A/en
Priority to PCT/JP1979/000271 priority patent/WO1980001002A1/ja
Priority to ES79485536A priority patent/ES485536A1/es
Publication of JPS5572811A publication Critical patent/JPS5572811A/ja
Priority to US06/428,605 priority patent/US4547895A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14687078A 1978-10-30 1978-11-28 Pattern check unit Pending JPS5572811A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP14687078A JPS5572811A (en) 1978-11-28 1978-11-28 Pattern check unit
US06/197,345 US4392120A (en) 1978-10-30 1979-10-25 Pattern inspection system
PCT/JP1979/000271 WO1980001002A1 (en) 1978-10-30 1979-10-25 Pattern inspection system
ES79485536A ES485536A1 (es) 1978-10-30 1979-10-30 Perfeccionamientos en sistemas de inspeccion de patrones pa-ra fotomascaras de circuitos impresos
US06/428,605 US4547895A (en) 1978-10-30 1982-09-30 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14687078A JPS5572811A (en) 1978-11-28 1978-11-28 Pattern check unit

Publications (1)

Publication Number Publication Date
JPS5572811A true JPS5572811A (en) 1980-06-02

Family

ID=15417421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14687078A Pending JPS5572811A (en) 1978-10-30 1978-11-28 Pattern check unit

Country Status (1)

Country Link
JP (1) JPS5572811A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS6170673A (ja) * 1984-09-13 1986-04-11 Fuji Electric Co Ltd 画像処理装置
JPH0192878A (ja) * 1987-10-02 1989-04-12 Toyo Ink Mfg Co Ltd 微小な不要または欠陥部分の検出方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS6170673A (ja) * 1984-09-13 1986-04-11 Fuji Electric Co Ltd 画像処理装置
JPH0192878A (ja) * 1987-10-02 1989-04-12 Toyo Ink Mfg Co Ltd 微小な不要または欠陥部分の検出方法

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