JPS5587431A - System for finding defect in repeated pattern - Google Patents

System for finding defect in repeated pattern

Info

Publication number
JPS5587431A
JPS5587431A JP16250078A JP16250078A JPS5587431A JP S5587431 A JPS5587431 A JP S5587431A JP 16250078 A JP16250078 A JP 16250078A JP 16250078 A JP16250078 A JP 16250078A JP S5587431 A JPS5587431 A JP S5587431A
Authority
JP
Japan
Prior art keywords
signal
sensor
patterns
electrode
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16250078A
Other languages
English (en)
Inventor
Tadatami Mori
Masaaki Nakamura
Isao Tofuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16250078A priority Critical patent/JPS5587431A/ja
Publication of JPS5587431A publication Critical patent/JPS5587431A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16250078A 1978-12-26 1978-12-26 System for finding defect in repeated pattern Pending JPS5587431A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16250078A JPS5587431A (en) 1978-12-26 1978-12-26 System for finding defect in repeated pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16250078A JPS5587431A (en) 1978-12-26 1978-12-26 System for finding defect in repeated pattern

Publications (1)

Publication Number Publication Date
JPS5587431A true JPS5587431A (en) 1980-07-02

Family

ID=15755793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16250078A Pending JPS5587431A (en) 1978-12-26 1978-12-26 System for finding defect in repeated pattern

Country Status (1)

Country Link
JP (1) JPS5587431A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62265512A (ja) * 1986-05-13 1987-11-18 Dainippon Printing Co Ltd シヤドウマスクの検査方法
JPH01265368A (ja) * 1988-04-15 1989-10-23 Matsushita Electric Ind Co Ltd 印刷パターンの検査装置
US6081613A (en) * 1994-08-24 2000-06-27 Matsushita Electric Industrial Co., Ltd. System for inspecting an appearance of a printed circuit board
US6445813B1 (en) 1994-08-24 2002-09-03 Matsushita Electric Industrial Co., Ltd. System for inspecting an apparatus of a printed circuit board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62265512A (ja) * 1986-05-13 1987-11-18 Dainippon Printing Co Ltd シヤドウマスクの検査方法
JPH01265368A (ja) * 1988-04-15 1989-10-23 Matsushita Electric Ind Co Ltd 印刷パターンの検査装置
US6081613A (en) * 1994-08-24 2000-06-27 Matsushita Electric Industrial Co., Ltd. System for inspecting an appearance of a printed circuit board
US6445813B1 (en) 1994-08-24 2002-09-03 Matsushita Electric Industrial Co., Ltd. System for inspecting an apparatus of a printed circuit board

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