JPS559406A - Semiconductor displacement transducer - Google Patents

Semiconductor displacement transducer

Info

Publication number
JPS559406A
JPS559406A JP8099178A JP8099178A JPS559406A JP S559406 A JPS559406 A JP S559406A JP 8099178 A JP8099178 A JP 8099178A JP 8099178 A JP8099178 A JP 8099178A JP S559406 A JPS559406 A JP S559406A
Authority
JP
Japan
Prior art keywords
strain
alloy
solder
solder layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8099178A
Other languages
Japanese (ja)
Inventor
Yasutoshi Kurihara
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8099178A priority Critical patent/JPS559406A/en
Publication of JPS559406A publication Critical patent/JPS559406A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires

Landscapes

  • Pressure Sensors (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE: To increase accuracy of a transducer by restricting the density ratio of Ge not more than 12wt % to Au in an alloy solder that is used to combine a strain detecting body with a strain transfering element, thus maintaining uniform soldering.
CONSTITUTION: A semiconductor strain detecting body 16 has a strain sensing area 13 in the first main surface 12 of a single semiconductor crystal 11 and an insulating layer 15 on the second main surface 14 which is located in the same way as the surface 12. A strain transferring element 17 is made of an elastic metal. A solder layer 18 is made of an alloy. The semiconductor strain detecting body 16 and the strain transfer element 17 are integrated with a laminated body of the solder layer 18 and an intermediate metal layer 19 to constitute a displacement transducer. An Au - Ge alloy is used in the alloy solder layer 18 to enable soldering at low temperature and the range of the density ratio of Ge to Au in the solder is set to be not more than 12wt % in order to maintain uniform soldering. As a result, a uniform solder layer, without allowing precipitation of particles which have highly concentrated Ge, is obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP8099178A 1978-07-05 1978-07-05 Semiconductor displacement transducer Pending JPS559406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8099178A JPS559406A (en) 1978-07-05 1978-07-05 Semiconductor displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8099178A JPS559406A (en) 1978-07-05 1978-07-05 Semiconductor displacement transducer

Publications (1)

Publication Number Publication Date
JPS559406A true JPS559406A (en) 1980-01-23

Family

ID=13733960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8099178A Pending JPS559406A (en) 1978-07-05 1978-07-05 Semiconductor displacement transducer

Country Status (1)

Country Link
JP (1) JPS559406A (en)

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