JPS5599738A - Automatic conveying equipment for wafer - Google Patents

Automatic conveying equipment for wafer

Info

Publication number
JPS5599738A
JPS5599738A JP713079A JP713079A JPS5599738A JP S5599738 A JPS5599738 A JP S5599738A JP 713079 A JP713079 A JP 713079A JP 713079 A JP713079 A JP 713079A JP S5599738 A JPS5599738 A JP S5599738A
Authority
JP
Japan
Prior art keywords
wafer
carry
piece
transfer
posture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP713079A
Other languages
Japanese (ja)
Inventor
Tetsuya Takagaki
Hiroto Nagatomo
Hisao Seki
Shiro Terasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP713079A priority Critical patent/JPS5599738A/en
Publication of JPS5599738A publication Critical patent/JPS5599738A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To automatize wafer conveying work to furnace core pipe by providing posture adjusting mechanism which adjusts posture of wafers and place them in order on heat treatment jig, and also wafer conveying mechanism.
CONSTITUTION: Carry-in route 7 is composed of wafer accepting part 9, which receives wafer 6 piece by piece, posture adjustment mechanism 10, carry-in buffer 11 and transfer 12 which moves right and left also to and from, and carry-out route 8 is composed of transfer 12, carry-out buffer 13, feeding mechanism 14 which feeds wafer piece by piece, and carry-out table 15.
COPYRIGHT: (C)1980,JPO&Japio
JP713079A 1979-01-26 1979-01-26 Automatic conveying equipment for wafer Pending JPS5599738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP713079A JPS5599738A (en) 1979-01-26 1979-01-26 Automatic conveying equipment for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP713079A JPS5599738A (en) 1979-01-26 1979-01-26 Automatic conveying equipment for wafer

Publications (1)

Publication Number Publication Date
JPS5599738A true JPS5599738A (en) 1980-07-30

Family

ID=11657488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP713079A Pending JPS5599738A (en) 1979-01-26 1979-01-26 Automatic conveying equipment for wafer

Country Status (1)

Country Link
JP (1) JPS5599738A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154017A (en) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp Furnace paddle for semiconductor wafer
US4611966A (en) * 1984-05-30 1986-09-16 Johnson Lester R Apparatus for transferring semiconductor wafers
US4662811A (en) * 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
US4695217A (en) * 1983-11-21 1987-09-22 Lau John J Semiconductor wafer transfer apparatus
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021682A (en) * 1973-05-21 1975-03-07
JPS50126170A (en) * 1974-03-23 1975-10-03
JPS5150569A (en) * 1974-10-29 1976-05-04 Kyushu Nippon Electric UEHAATATE KAESOCHI

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021682A (en) * 1973-05-21 1975-03-07
JPS50126170A (en) * 1974-03-23 1975-10-03
JPS5150569A (en) * 1974-10-29 1976-05-04 Kyushu Nippon Electric UEHAATATE KAESOCHI

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154017A (en) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp Furnace paddle for semiconductor wafer
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
US4662811A (en) * 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
US4695217A (en) * 1983-11-21 1987-09-22 Lau John J Semiconductor wafer transfer apparatus
US4611966A (en) * 1984-05-30 1986-09-16 Johnson Lester R Apparatus for transferring semiconductor wafers

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