JPS56109256A - Pellicle-forming coating liquid composition and coating thereof - Google Patents
Pellicle-forming coating liquid composition and coating thereofInfo
- Publication number
- JPS56109256A JPS56109256A JP1149880A JP1149880A JPS56109256A JP S56109256 A JPS56109256 A JP S56109256A JP 1149880 A JP1149880 A JP 1149880A JP 1149880 A JP1149880 A JP 1149880A JP S56109256 A JPS56109256 A JP S56109256A
- Authority
- JP
- Japan
- Prior art keywords
- compsn
- acetyl
- pellicle
- contg
- cycloalkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title abstract 3
- 238000000576 coating method Methods 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 title abstract 2
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract 3
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 abstract 2
- 125000000753 cycloalkyl group Chemical group 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 abstract 2
- 229920000642 polymer Polymers 0.000 abstract 2
- 239000002904 solvent Substances 0.000 abstract 2
- ZDDVSYUZBQJVJG-UHFFFAOYSA-N 1-acetyl-3-butylaziridin-2-one Chemical compound CCCCC1N(C(C)=O)C1=O ZDDVSYUZBQJVJG-UHFFFAOYSA-N 0.000 abstract 1
- OEKATORRSPXJHE-UHFFFAOYSA-N 2-acetylcyclohexan-1-one Chemical compound CC(=O)C1CCCCC1=O OEKATORRSPXJHE-UHFFFAOYSA-N 0.000 abstract 1
- 125000003545 alkoxy group Chemical group 0.000 abstract 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 abstract 1
- 125000003262 carboxylic acid ester group Chemical group [H]C([H])([*:2])OC(=O)C([H])([H])[*:1] 0.000 abstract 1
- 125000004093 cyano group Chemical group *C#N 0.000 abstract 1
- 150000001925 cycloalkenes Chemical group 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000009736 wetting Methods 0.000 abstract 1
Landscapes
- Paints Or Removers (AREA)
- Organic Insulating Materials (AREA)
- Processes Of Treating Macromolecular Substances (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1149880A JPS56109256A (en) | 1980-02-04 | 1980-02-04 | Pellicle-forming coating liquid composition and coating thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1149880A JPS56109256A (en) | 1980-02-04 | 1980-02-04 | Pellicle-forming coating liquid composition and coating thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56109256A true JPS56109256A (en) | 1981-08-29 |
| JPS6314749B2 JPS6314749B2 (2) | 1988-04-01 |
Family
ID=11779682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1149880A Granted JPS56109256A (en) | 1980-02-04 | 1980-02-04 | Pellicle-forming coating liquid composition and coating thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56109256A (2) |
-
1980
- 1980-02-04 JP JP1149880A patent/JPS56109256A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6314749B2 (2) | 1988-04-01 |
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