JPS56146227A - Heat treatment furnace - Google Patents

Heat treatment furnace

Info

Publication number
JPS56146227A
JPS56146227A JP4922880A JP4922880A JPS56146227A JP S56146227 A JPS56146227 A JP S56146227A JP 4922880 A JP4922880 A JP 4922880A JP 4922880 A JP4922880 A JP 4922880A JP S56146227 A JPS56146227 A JP S56146227A
Authority
JP
Japan
Prior art keywords
air layer
furnace
heat insulating
temperature
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4922880A
Other languages
Japanese (ja)
Other versions
JPS6337494B2 (en
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4922880A priority Critical patent/JPS56146227A/en
Publication of JPS56146227A publication Critical patent/JPS56146227A/en
Publication of JPS6337494B2 publication Critical patent/JPS6337494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To shorten the time of fall of the temperature in the furnace by a method wherein a sealed air layer capable of being communicated with the outside is formed inside a heat insulating member which covers a heater coil arranged around a core tube. CONSTITUTION:The heater coil 13 is arranged around the core tube disposed inside the furnace 11 and in addition, the air layer 18 (23 shows an inner air layer and 24 shows an outer air layer) capable of being communicated with the air by means of an open-close valve 32 is formed inside the cylindrical heat insulating member 15 which is disposed so as to cover the coil 13. Thereby, a heat retaining effect is raised by a heat insulating effect at the heat treatment, and the air is ventilated by means of the valve 32 to enable the temperature to rapidly be fallen at the descent of the temperature inside the furnace.
JP4922880A 1980-04-16 1980-04-16 Heat treatment furnace Granted JPS56146227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4922880A JPS56146227A (en) 1980-04-16 1980-04-16 Heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4922880A JPS56146227A (en) 1980-04-16 1980-04-16 Heat treatment furnace

Publications (2)

Publication Number Publication Date
JPS56146227A true JPS56146227A (en) 1981-11-13
JPS6337494B2 JPS6337494B2 (en) 1988-07-26

Family

ID=12825051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4922880A Granted JPS56146227A (en) 1980-04-16 1980-04-16 Heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS56146227A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448022U (en) * 1987-09-18 1989-03-24
JPH01300517A (en) * 1988-05-27 1989-12-05 Tel Sagami Ltd Heating apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390033A (en) * 1977-01-19 1978-08-08 Hitachi Ltd Heat treatment equipment
JPS5694750A (en) * 1979-12-28 1981-07-31 Nippon Instr Kk Heating treatment device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390033A (en) * 1977-01-19 1978-08-08 Hitachi Ltd Heat treatment equipment
JPS5694750A (en) * 1979-12-28 1981-07-31 Nippon Instr Kk Heating treatment device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448022U (en) * 1987-09-18 1989-03-24
JPH01300517A (en) * 1988-05-27 1989-12-05 Tel Sagami Ltd Heating apparatus

Also Published As

Publication number Publication date
JPS6337494B2 (en) 1988-07-26

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