JPS5615542A - Mass analyzer equipped with tetraelectrode - Google Patents

Mass analyzer equipped with tetraelectrode

Info

Publication number
JPS5615542A
JPS5615542A JP9206479A JP9206479A JPS5615542A JP S5615542 A JPS5615542 A JP S5615542A JP 9206479 A JP9206479 A JP 9206479A JP 9206479 A JP9206479 A JP 9206479A JP S5615542 A JPS5615542 A JP S5615542A
Authority
JP
Japan
Prior art keywords
tetraelectrode
sectorial
static field
sample
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9206479A
Other languages
Japanese (ja)
Other versions
JPS5913151B2 (en
Inventor
Yoshiaki Yoshioka
Nobuo Nakamura
Kenji Kusao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP54092064A priority Critical patent/JPS5913151B2/en
Publication of JPS5615542A publication Critical patent/JPS5615542A/en
Publication of JPS5913151B2 publication Critical patent/JPS5913151B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To ease the manufacture of a secondary ion mass analyzer by simplifying its construction in such a way that it is able to analize simultaneously positive and negative ions generated from a sample by an impact of ions against the sample by using a single tetraelectrode. CONSTITUTION:A positive secondary ion 3, which is discharged by striking a primary ion 2 against a sample 1, is converged by an Einzel lens 4, and led to a tetraelectrode 6 through an energy filter 5 of a sectorial static field and, through a grid 8 of a sectorial static field 7, detected by a detector 10. On the other hand, a negative ion 11 is led to a tetraelectrode 6 through a lens 12 and the sectorial static field 7, passed to the sectorial static field 5, and through its grid 13 finally detected by a detector 15. Thus, a simultaneous mass analysis of positive and negative ions can be performed by the use of the single tetraelectrode 6 and the reduction of the manufacturing cost of the analyzer is attained due to its so-simplified construction.
JP54092064A 1979-07-19 1979-07-19 quadrupole mass spectrometer Expired JPS5913151B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54092064A JPS5913151B2 (en) 1979-07-19 1979-07-19 quadrupole mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54092064A JPS5913151B2 (en) 1979-07-19 1979-07-19 quadrupole mass spectrometer

Publications (2)

Publication Number Publication Date
JPS5615542A true JPS5615542A (en) 1981-02-14
JPS5913151B2 JPS5913151B2 (en) 1984-03-28

Family

ID=14044037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54092064A Expired JPS5913151B2 (en) 1979-07-19 1979-07-19 quadrupole mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5913151B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152121U (en) * 1985-03-12 1986-09-20
JPS6231935A (en) * 1985-08-05 1987-02-10 Nippon Telegr & Teleph Corp <Ntt> Secondary ion mass spectrometer
US6051057A (en) * 1997-05-16 2000-04-18 Seiko Epson Corporation Ink jet recording ink

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152121U (en) * 1985-03-12 1986-09-20
JPS6231935A (en) * 1985-08-05 1987-02-10 Nippon Telegr & Teleph Corp <Ntt> Secondary ion mass spectrometer
US6051057A (en) * 1997-05-16 2000-04-18 Seiko Epson Corporation Ink jet recording ink

Also Published As

Publication number Publication date
JPS5913151B2 (en) 1984-03-28

Similar Documents

Publication Publication Date Title
JPS5713660A (en) Method of analysing solid local gas and its device
JPS5312389A (en) Mass spectrograph
JPS57189448A (en) Charged-particle analyzing device
JPS5512632A (en) Ion source device for mass spectrometer
GB1445963A (en) Ion beam apparatus
JPS5336292A (en) Analyzer for charged particles
JPS5616853A (en) Surface analysis unit
JPS5774957A (en) Ionizing device of mass spectrometer
JPS543593A (en) Solid surface analyzer
JPS5279989A (en) Ion microanalyzer
JPS5244687A (en) Secondary ion mass spectrometric device
JPS56132757A (en) Ion source for mass spectrometer
JPS5341184A (en) Ion injection device
JPS54145592A (en) X-ray analyzer
JPS56168327A (en) Hollow cathode for secondary ion mass spectroscope
JPS5336291A (en) Mass spectrometer
JPS52120891A (en) Ion microanalyzer
JPS6419664A (en) Ion beam device
JPS5611843A (en) Ion implanter
JPS5780652A (en) Mass analyzer
JPS57115752A (en) Ion detector for mass spectrograph
JPS52102791A (en) Ion microanalyzer
JPS56167249A (en) Ion analizer
Ulbricht Development of a Unique Time-of-Flight Mass Spectrometer for Uranium Isotopic Analysis.
JPS6433843A (en) Secondary ion mass spectrometer