JPS5621048A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5621048A
JPS5621048A JP9764979A JP9764979A JPS5621048A JP S5621048 A JPS5621048 A JP S5621048A JP 9764979 A JP9764979 A JP 9764979A JP 9764979 A JP9764979 A JP 9764979A JP S5621048 A JPS5621048 A JP S5621048A
Authority
JP
Japan
Prior art keywords
humidity
layer
sensor
aluminium oxide
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9764979A
Other languages
Japanese (ja)
Other versions
JPS6224739B2 (en
Inventor
Rikuro Sono
Osamu Sakuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9764979A priority Critical patent/JPS5621048A/en
Publication of JPS5621048A publication Critical patent/JPS5621048A/en
Publication of JPS6224739B2 publication Critical patent/JPS6224739B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To simplify the preparation and to improve the sensitivity of the humidity sensor by forming an aluminium oxide layer having a humidity-sensitive layer on an aluminium foil.
CONSTITUTION: The concavely bent aluminium foil 12 is all coated with a resist layer 14 except for the center of the bottom 8, soaked in an electrolyte to anodize for forming an aluminium oxide layer 15 on the center of the bottom 8, and soaked in dilute hydrochloric acid to form a humidity-sensitive layer 16 having absorbed mainly chlorine ions having hygroscopicity on the surface layer of the aluminium oxide 15. Then the resist layer 14 is removed, and the rest is washed witha water and dried to form a sensor principal part 10 comprising a humidity-sensitive portion 9 and the first and sencond terminal portions 3 and 3'. The sensor principal part 10 is mounted on a substrate 1 having electrode pads 2 and 2' and external leads 5 and 5', through a conductive bonding agent 11. This permits the humidity sensor to be prepared by a simple process. Moreover, since the humidity-sensitive portion 9 is allowed to directly contact with humidity, the response can be speeded up, and the sensitivity can be improved.
COPYRIGHT: (C)1981,JPO&Japio
JP9764979A 1979-07-31 1979-07-31 Humidity sensor Granted JPS5621048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9764979A JPS5621048A (en) 1979-07-31 1979-07-31 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9764979A JPS5621048A (en) 1979-07-31 1979-07-31 Humidity sensor

Publications (2)

Publication Number Publication Date
JPS5621048A true JPS5621048A (en) 1981-02-27
JPS6224739B2 JPS6224739B2 (en) 1987-05-29

Family

ID=14197936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9764979A Granted JPS5621048A (en) 1979-07-31 1979-07-31 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5621048A (en)

Also Published As

Publication number Publication date
JPS6224739B2 (en) 1987-05-29

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