JPS56274A - Continuous vacuum deposition apparatus - Google Patents

Continuous vacuum deposition apparatus

Info

Publication number
JPS56274A
JPS56274A JP7571279A JP7571279A JPS56274A JP S56274 A JPS56274 A JP S56274A JP 7571279 A JP7571279 A JP 7571279A JP 7571279 A JP7571279 A JP 7571279A JP S56274 A JPS56274 A JP S56274A
Authority
JP
Japan
Prior art keywords
vacuum
substrate
substrates
supporter
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7571279A
Other languages
English (en)
Inventor
Motoyasu Terao
Tadaaki Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7571279A priority Critical patent/JPS56274A/ja
Publication of JPS56274A publication Critical patent/JPS56274A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7571279A 1979-06-18 1979-06-18 Continuous vacuum deposition apparatus Pending JPS56274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7571279A JPS56274A (en) 1979-06-18 1979-06-18 Continuous vacuum deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7571279A JPS56274A (en) 1979-06-18 1979-06-18 Continuous vacuum deposition apparatus

Publications (1)

Publication Number Publication Date
JPS56274A true JPS56274A (en) 1981-01-06

Family

ID=13584120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7571279A Pending JPS56274A (en) 1979-06-18 1979-06-18 Continuous vacuum deposition apparatus

Country Status (1)

Country Link
JP (1) JPS56274A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2594102A1 (fr) * 1986-02-12 1987-08-14 Stein Heurtey Installation flexible automatisee de traitement thermochimique rapide
FR2621023A1 (fr) * 1987-09-24 1989-03-31 Stein Heurtey Installation automatique de traitement thermochimique rapide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2594102A1 (fr) * 1986-02-12 1987-08-14 Stein Heurtey Installation flexible automatisee de traitement thermochimique rapide
FR2621023A1 (fr) * 1987-09-24 1989-03-31 Stein Heurtey Installation automatique de traitement thermochimique rapide

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