JPS5635005A - Detector for center position of object to be measured - Google Patents

Detector for center position of object to be measured

Info

Publication number
JPS5635005A
JPS5635005A JP11080679A JP11080679A JPS5635005A JP S5635005 A JPS5635005 A JP S5635005A JP 11080679 A JP11080679 A JP 11080679A JP 11080679 A JP11080679 A JP 11080679A JP S5635005 A JPS5635005 A JP S5635005A
Authority
JP
Japan
Prior art keywords
center position
measured
processing
line
register
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11080679A
Other languages
English (en)
Inventor
Nagamitsu Mikuriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11080679A priority Critical patent/JPS5635005A/ja
Publication of JPS5635005A publication Critical patent/JPS5635005A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Image Analysis (AREA)
JP11080679A 1979-08-29 1979-08-29 Detector for center position of object to be measured Pending JPS5635005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11080679A JPS5635005A (en) 1979-08-29 1979-08-29 Detector for center position of object to be measured

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11080679A JPS5635005A (en) 1979-08-29 1979-08-29 Detector for center position of object to be measured

Publications (1)

Publication Number Publication Date
JPS5635005A true JPS5635005A (en) 1981-04-07

Family

ID=14545120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11080679A Pending JPS5635005A (en) 1979-08-29 1979-08-29 Detector for center position of object to be measured

Country Status (1)

Country Link
JP (1) JPS5635005A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872004A (ja) * 1981-10-27 1983-04-28 Toshiba Mach Co Ltd 横方向穴の計測方法
JPS5987312A (ja) * 1982-09-14 1984-05-19 リチヨツピングス・メカニスカ・フエルクシユタツズ・ア−ベ− 円形物体の中心位置の割り出し方法
JPS6234004A (ja) * 1985-08-07 1987-02-14 Nissan Motor Co Ltd 円および円弧の中心点検出方法
JPH02207548A (ja) * 1989-02-08 1990-08-17 Oki Electric Ind Co Ltd 半導体ウエハの位置決め方法
JPH03160303A (ja) * 1989-11-17 1991-07-10 Kawasaki Heavy Ind Ltd 多重孔の検出方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872004A (ja) * 1981-10-27 1983-04-28 Toshiba Mach Co Ltd 横方向穴の計測方法
JPS5987312A (ja) * 1982-09-14 1984-05-19 リチヨツピングス・メカニスカ・フエルクシユタツズ・ア−ベ− 円形物体の中心位置の割り出し方法
JPS6234004A (ja) * 1985-08-07 1987-02-14 Nissan Motor Co Ltd 円および円弧の中心点検出方法
JPH02207548A (ja) * 1989-02-08 1990-08-17 Oki Electric Ind Co Ltd 半導体ウエハの位置決め方法
JPH03160303A (ja) * 1989-11-17 1991-07-10 Kawasaki Heavy Ind Ltd 多重孔の検出方法

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