JPS5643552A - Moisture sensing semiconductor element and its preparation - Google Patents
Moisture sensing semiconductor element and its preparationInfo
- Publication number
- JPS5643552A JPS5643552A JP11936779A JP11936779A JPS5643552A JP S5643552 A JPS5643552 A JP S5643552A JP 11936779 A JP11936779 A JP 11936779A JP 11936779 A JP11936779 A JP 11936779A JP S5643552 A JPS5643552 A JP S5643552A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- moisture sensing
- junction
- preparation
- regard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 abstract 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 abstract 2
- 239000011540 sensing material Substances 0.000 abstract 2
- 229920002379 silicone rubber Polymers 0.000 abstract 2
- 239000004945 silicone rubber Substances 0.000 abstract 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical group OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 abstract 1
- DBUQSUOAUHCEJL-UHFFFAOYSA-M butyl(diethyl)stannanylium;acetate Chemical compound CCCC[Sn](CC)(CC)OC(C)=O DBUQSUOAUHCEJL-UHFFFAOYSA-M 0.000 abstract 1
- 239000003054 catalyst Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 229920005645 diorganopolysiloxane polymer Polymers 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 150000001282 organosilanes Chemical class 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 abstract 1
- 229920002554 vinyl polymer Chemical group 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To obtain a moisture sensing semiconductor element which has a high sensitivity and also is excellent in mass-productivity, by covering the exposed part of p-n junction of a semiconductor element with moisture sensing material made of specific silicone rubber.
CONSTITUTION: A compound of 100pts.wt. diorganopolysiloxane (a) having a hydroxyl group at its end, shown in the expression II (R' is methyl, ethyl, phenol; n is 50W500), about 1W15pts.wt. organosilane (b) shown in the expression I (R is methyl, ethyl, vinyl), and about 0.01W1pts.wt. hardening catalyst (for instance, n-butyl-diethyltin acetate) (c) is applied on the exposed part of p-n junction of a semiconductor element, it is hardened, and a film of moisture sensing material made of a silicone rubber is formed. (In this regard, it is desirable to perform heat treatment in inert gas after hardening.) In this regard, as for the above-mentioned semiconductor element, that which has p-n junction is available, and a diode, a thyristor, a transistor, etc. are used.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11936779A JPS5643552A (en) | 1979-09-19 | 1979-09-19 | Moisture sensing semiconductor element and its preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11936779A JPS5643552A (en) | 1979-09-19 | 1979-09-19 | Moisture sensing semiconductor element and its preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5643552A true JPS5643552A (en) | 1981-04-22 |
Family
ID=14759736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11936779A Pending JPS5643552A (en) | 1979-09-19 | 1979-09-19 | Moisture sensing semiconductor element and its preparation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5643552A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991017430A1 (en) * | 1990-05-02 | 1991-11-14 | The University Of Michigan | Solid state ion sensor with silicone membrane |
-
1979
- 1979-09-19 JP JP11936779A patent/JPS5643552A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991017430A1 (en) * | 1990-05-02 | 1991-11-14 | The University Of Michigan | Solid state ion sensor with silicone membrane |
| US5102526A (en) * | 1990-05-02 | 1992-04-07 | The University Of Michigan | Solid state ion sensor with silicon membrane |
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