JPS5643737A - Automatic potential measurement device within ic - Google Patents

Automatic potential measurement device within ic

Info

Publication number
JPS5643737A
JPS5643737A JP11899679A JP11899679A JPS5643737A JP S5643737 A JPS5643737 A JP S5643737A JP 11899679 A JP11899679 A JP 11899679A JP 11899679 A JP11899679 A JP 11899679A JP S5643737 A JPS5643737 A JP S5643737A
Authority
JP
Japan
Prior art keywords
electron
voltage
illuminated
moving speed
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11899679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS647498B2 (2
Inventor
Kanji Iwase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11899679A priority Critical patent/JPS5643737A/ja
Publication of JPS5643737A publication Critical patent/JPS5643737A/ja
Publication of JPS647498B2 publication Critical patent/JPS647498B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11899679A 1979-09-17 1979-09-17 Automatic potential measurement device within ic Granted JPS5643737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11899679A JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11899679A JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Publications (2)

Publication Number Publication Date
JPS5643737A true JPS5643737A (en) 1981-04-22
JPS647498B2 JPS647498B2 (2) 1989-02-09

Family

ID=14750413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11899679A Granted JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Country Status (1)

Country Link
JP (1) JPS5643737A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6164056A (ja) * 1984-08-06 1986-04-02 シ−メンス、アクチエンゲゼルシヤフト 測定点の検出および写像のための方法および装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108580A (2) * 1975-03-19 1976-09-25 Fujitsu Ltd
JPS5390876A (en) * 1977-01-21 1978-08-10 Nippon Telegr & Teleph Corp <Ntt> Inspecting method for integrated semiconductor circuit device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108580A (2) * 1975-03-19 1976-09-25 Fujitsu Ltd
JPS5390876A (en) * 1977-01-21 1978-08-10 Nippon Telegr & Teleph Corp <Ntt> Inspecting method for integrated semiconductor circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6164056A (ja) * 1984-08-06 1986-04-02 シ−メンス、アクチエンゲゼルシヤフト 測定点の検出および写像のための方法および装置

Also Published As

Publication number Publication date
JPS647498B2 (2) 1989-02-09

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