JPS565573B2 - - Google Patents
Info
- Publication number
- JPS565573B2 JPS565573B2 JP5780073A JP5780073A JPS565573B2 JP S565573 B2 JPS565573 B2 JP S565573B2 JP 5780073 A JP5780073 A JP 5780073A JP 5780073 A JP5780073 A JP 5780073A JP S565573 B2 JPS565573 B2 JP S565573B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780073A JPS565573B2 (ja) | 1973-05-25 | 1973-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780073A JPS565573B2 (ja) | 1973-05-25 | 1973-05-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS507785A JPS507785A (ja) | 1975-01-27 |
| JPS565573B2 true JPS565573B2 (ja) | 1981-02-05 |
Family
ID=13065969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5780073A Expired JPS565573B2 (ja) | 1973-05-25 | 1973-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565573B2 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53130976A (en) * | 1977-04-20 | 1978-11-15 | Hitachi Ltd | Epitaxial growing device |
| JPS5665974A (en) * | 1979-11-02 | 1981-06-04 | Komatsu Ltd | Vapor deposition controlling method |
| JPH0690131B2 (ja) * | 1984-03-21 | 1994-11-14 | 日電アネルバ株式会社 | 成膜モニター方法 |
| JP2632239B2 (ja) * | 1990-10-31 | 1997-07-23 | 日亜化学工業株式会社 | 半導体結晶膜の成長方法および装置 |
| JP2687742B2 (ja) * | 1991-02-04 | 1997-12-08 | 日亜化学工業株式会社 | 半導体結晶膜の表面状態測定方法 |
| JPH10163182A (ja) * | 1996-11-29 | 1998-06-19 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置およびそれに使用可能な膜厚測定装置 |
-
1973
- 1973-05-25 JP JP5780073A patent/JPS565573B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS507785A (ja) | 1975-01-27 |