JPS565973A - Film forming method - Google Patents
Film forming methodInfo
- Publication number
- JPS565973A JPS565973A JP8209279A JP8209279A JPS565973A JP S565973 A JPS565973 A JP S565973A JP 8209279 A JP8209279 A JP 8209279A JP 8209279 A JP8209279 A JP 8209279A JP S565973 A JPS565973 A JP S565973A
- Authority
- JP
- Japan
- Prior art keywords
- supporter
- electrode
- film
- chamber
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
PURPOSE:To form a uniform film of large area by arranging many wire discharge electrodes in an evacuatable deposition chamber in parallel with a movable supporter and inducing dishcarge between the adjacent wires while introducing a reactive gas. CONSTITUTION:A film of large area is formed with high reproducibility and uniformity in its physical characteristics and thickness over the whole surface. For example, deposition chamber 103 is internally provided with film forming beltlike supporter 104 which is coiled with roller 107, gas supplying means 110 for supplying a gas into chamber 103, and discharge electrode 109. Electrode 109 is composed of many wire electrodes which have been divided into A group 108-1 and B group 108-2 and arranged in parallel with supporter 104 so that an electric field is formed between the adjacent wires to charge electrode 109 with electric energy. Chamber 1-3 is evacuated, a reactive gas is introduced with means 110, and discharge is induced between the electrodes. Supporter 104 with a film formed is coiled with roller 107 so that it is moved relatively to electrode 109.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209279A JPS565973A (en) | 1979-06-27 | 1979-06-27 | Film forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209279A JPS565973A (en) | 1979-06-27 | 1979-06-27 | Film forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS565973A true JPS565973A (en) | 1981-01-22 |
| JPS6257711B2 JPS6257711B2 (en) | 1987-12-02 |
Family
ID=13764783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8209279A Granted JPS565973A (en) | 1979-06-27 | 1979-06-27 | Film forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS565973A (en) |
-
1979
- 1979-06-27 JP JP8209279A patent/JPS565973A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6257711B2 (en) | 1987-12-02 |
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