JPS5667979A - Preparation method of josephson element - Google Patents

Preparation method of josephson element

Info

Publication number
JPS5667979A
JPS5667979A JP14347279A JP14347279A JPS5667979A JP S5667979 A JPS5667979 A JP S5667979A JP 14347279 A JP14347279 A JP 14347279A JP 14347279 A JP14347279 A JP 14347279A JP S5667979 A JPS5667979 A JP S5667979A
Authority
JP
Japan
Prior art keywords
body layer
throttle part
mask
film
taking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14347279A
Other languages
Japanese (ja)
Other versions
JPS605230B2 (en
Inventor
Natsuo Tsubouchi
Shinichi Sato
Hiroji Harada
Masahiko Denda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP54143472A priority Critical patent/JPS605230B2/en
Publication of JPS5667979A publication Critical patent/JPS5667979A/en
Publication of JPS605230B2 publication Critical patent/JPS605230B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To form a throttle part of a Josephson element with high accuracy by a method wherein an oxide resisting material film of a superconduction body layer is formed into a micro bridge shape having a throttle part on an oxide film of a substrate and taking the oxide resisting material film as a mask, the ultra conduction body layer is oxidized. CONSTITUTION:A silicon oxide film 2 is formed on a silicon substrate 1 and thereupon, approximately 50,000Angstrom of an ultra conduction body layer 3 such as Nb is evaporated and stil thereupon, approximately 1,000Angstrom of a silicon nitride film 5 is piled by means of a CVD method. Next thereto, a photo resist 6 of a given pattern is formed and taking this as a mask, the nitride film 5 and the superconduction body layer 3 are etched selectively to form a micro bridge shape having a throttle part 7. After the photo resist 6 is etched, when the superconduction body layer is oxidized taking the nitride film 5 as a mask, oxidation advance from an edge part, as a result, if an oxidation time is adjusted and controlled, the dimension of a throttle part 7 can be formed with high accuracy.
JP54143472A 1979-11-05 1979-11-05 Manufacturing method of Josephson device Expired JPS605230B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54143472A JPS605230B2 (en) 1979-11-05 1979-11-05 Manufacturing method of Josephson device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54143472A JPS605230B2 (en) 1979-11-05 1979-11-05 Manufacturing method of Josephson device

Publications (2)

Publication Number Publication Date
JPS5667979A true JPS5667979A (en) 1981-06-08
JPS605230B2 JPS605230B2 (en) 1985-02-08

Family

ID=15339486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54143472A Expired JPS605230B2 (en) 1979-11-05 1979-11-05 Manufacturing method of Josephson device

Country Status (1)

Country Link
JP (1) JPS605230B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164278A (en) * 1982-03-23 1983-09-29 Shimadzu Corp Thin film bridge type SQUID device
KR20030071300A (en) * 2002-02-28 2003-09-03 엘지전자 주식회사 Manufacturing method for divice junction Josephson superconductor
KR100459125B1 (en) * 2002-02-28 2004-12-03 엘지전자 주식회사 Manufacturing method for divice junction Josephson superconductor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164278A (en) * 1982-03-23 1983-09-29 Shimadzu Corp Thin film bridge type SQUID device
KR20030071300A (en) * 2002-02-28 2003-09-03 엘지전자 주식회사 Manufacturing method for divice junction Josephson superconductor
KR100459125B1 (en) * 2002-02-28 2004-12-03 엘지전자 주식회사 Manufacturing method for divice junction Josephson superconductor

Also Published As

Publication number Publication date
JPS605230B2 (en) 1985-02-08

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