JPS5678212A - Forming method for flank electrode of thin tuning fork type quartz oscillating bar - Google Patents
Forming method for flank electrode of thin tuning fork type quartz oscillating barInfo
- Publication number
- JPS5678212A JPS5678212A JP12812580A JP12812580A JPS5678212A JP S5678212 A JPS5678212 A JP S5678212A JP 12812580 A JP12812580 A JP 12812580A JP 12812580 A JP12812580 A JP 12812580A JP S5678212 A JPS5678212 A JP S5678212A
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- thin
- oscillating bar
- flank
- quartz oscillating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title abstract 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 11
- 238000000034 method Methods 0.000 title abstract 2
- 238000005530 etching Methods 0.000 abstract 3
- 239000010409 thin film Substances 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To obtain large value in use by providing a quartz oscillator, using a quartz oscillating bar in a thin plate shape obtained by etching work, with the same performance that a quartz oscillator using a relatively large quartz oscillating piece obtained principally by mechanical work has. CONSTITUTION:Thin-plate quartz oscillating bar 5 of about 0.1mm. thickness obtained by etching work has a conductive thin film of about several hundreds Angstrom - several mum formed on the flank by making use of the thin-film formation technique by sputtering. In this case, the formation of flank electrodes 10 and 11 inside and outside of turning-fork branches and the conduction of inphase electrodes 6 and 8, and 7 and 9 between the top and reverse surfaces are performed at a time by performing sputtering on the quartz surface once while extending conductive thin films sufficiently to the flank and part of the reverse surface, not to mention the surface of quartz oscillating piece 5. Thus, the performance equivalent to that of a quartz oscillator using a relatively large quartz oscillating bar obtained principally by mechanical work can be realized by a quartz oscillator using thin-plate oscillating bar 5 obtained by etching work, so that the value in use can be improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12812580A JPS5678212A (en) | 1980-09-16 | 1980-09-16 | Forming method for flank electrode of thin tuning fork type quartz oscillating bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12812580A JPS5678212A (en) | 1980-09-16 | 1980-09-16 | Forming method for flank electrode of thin tuning fork type quartz oscillating bar |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6313576A Division JPS52146588A (en) | 1976-05-31 | 1976-05-31 | Quartz oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5678212A true JPS5678212A (en) | 1981-06-27 |
Family
ID=14977005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12812580A Pending JPS5678212A (en) | 1980-09-16 | 1980-09-16 | Forming method for flank electrode of thin tuning fork type quartz oscillating bar |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5678212A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5224485A (en) * | 1975-08-20 | 1977-02-23 | Morio Onoe | Quartz vibrator |
-
1980
- 1980-09-16 JP JP12812580A patent/JPS5678212A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5224485A (en) * | 1975-08-20 | 1977-02-23 | Morio Onoe | Quartz vibrator |
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