JPS5686343A - Method for ion microanalysis - Google Patents

Method for ion microanalysis

Info

Publication number
JPS5686343A
JPS5686343A JP16346479A JP16346479A JPS5686343A JP S5686343 A JPS5686343 A JP S5686343A JP 16346479 A JP16346479 A JP 16346479A JP 16346479 A JP16346479 A JP 16346479A JP S5686343 A JPS5686343 A JP S5686343A
Authority
JP
Japan
Prior art keywords
equal
gaseous
oxygen
gas
gaseous argon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16346479A
Other languages
Japanese (ja)
Inventor
Takashi Furusawa
Hiroko Konno
Yasuo Udou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16346479A priority Critical patent/JPS5686343A/en
Publication of JPS5686343A publication Critical patent/JPS5686343A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To improve both the detecting sensitivity of ion microanalysis and the rate of sputter etching, by using gaseous argon admixed with a suitable quantity of gaseous oxygen. CONSTITUTION:Gaseous argon admixed with 3-20vol% oxygen is used as the gas for generating ions. Using of said gas makes it possible to perform analysis with equal detection sensitivity to that when pure gaseous oxygen is used and with equal rate of sputter etching to that when pure gaseous argon is used. Using of said gas allows in addition to reduce the oxidation and consumption of cathode placed in the chamber where ions are generated, hence the durable time of the electric discharge is equal to that when pure gaseous argon is used.
JP16346479A 1979-12-18 1979-12-18 Method for ion microanalysis Pending JPS5686343A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16346479A JPS5686343A (en) 1979-12-18 1979-12-18 Method for ion microanalysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16346479A JPS5686343A (en) 1979-12-18 1979-12-18 Method for ion microanalysis

Publications (1)

Publication Number Publication Date
JPS5686343A true JPS5686343A (en) 1981-07-14

Family

ID=15774366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16346479A Pending JPS5686343A (en) 1979-12-18 1979-12-18 Method for ion microanalysis

Country Status (1)

Country Link
JP (1) JPS5686343A (en)

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