JPS5693310A - Manufacture of magnetic bubble device - Google Patents

Manufacture of magnetic bubble device

Info

Publication number
JPS5693310A
JPS5693310A JP16985179A JP16985179A JPS5693310A JP S5693310 A JPS5693310 A JP S5693310A JP 16985179 A JP16985179 A JP 16985179A JP 16985179 A JP16985179 A JP 16985179A JP S5693310 A JPS5693310 A JP S5693310A
Authority
JP
Japan
Prior art keywords
layer
conductor pattern
conductor
manufacture
level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16985179A
Other languages
Japanese (ja)
Inventor
Hideki Fujiwara
Niwaji Majima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16985179A priority Critical patent/JPS5693310A/en
Publication of JPS5693310A publication Critical patent/JPS5693310A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain the level surface of the conductor pattern for the subject device by a method wherein a gin, having almost equal etching rate to the insulating layer on the conductor pattern or the conductor layer on the insulating layer, is used. CONSTITUTION:On the whole surface of conductor pattern 33 formed on a crystalline substrate 31 through the intermediary of an insulating layer 32, an SiO2 layer 34 is formed using a sputtering method. Then the resin 35 having the equal etching rate to the layer 34 is selected and applied on the layer 34 evenly. And, a level conductor pattern 33 is formed by performing an ion etching or a gas plasma etching. Also the selected resin 45 is applied on the conductor layer 44 formed on the crystalline substrate 41 through the intermediary of an SiO2 layer 42, and then the level conductor pattern 44 can be formed by performing a gettering.
JP16985179A 1979-12-26 1979-12-26 Manufacture of magnetic bubble device Pending JPS5693310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16985179A JPS5693310A (en) 1979-12-26 1979-12-26 Manufacture of magnetic bubble device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16985179A JPS5693310A (en) 1979-12-26 1979-12-26 Manufacture of magnetic bubble device

Publications (1)

Publication Number Publication Date
JPS5693310A true JPS5693310A (en) 1981-07-28

Family

ID=15894104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16985179A Pending JPS5693310A (en) 1979-12-26 1979-12-26 Manufacture of magnetic bubble device

Country Status (1)

Country Link
JP (1) JPS5693310A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62239491A (en) * 1986-04-11 1987-10-20 Fujitsu Ltd Magnetic bubble memory element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62239491A (en) * 1986-04-11 1987-10-20 Fujitsu Ltd Magnetic bubble memory element

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