JPS5697809A - Method and device for measuring thickness of dielectric layer with sandwiched conductive layer - Google Patents

Method and device for measuring thickness of dielectric layer with sandwiched conductive layer

Info

Publication number
JPS5697809A
JPS5697809A JP17215679A JP17215679A JPS5697809A JP S5697809 A JPS5697809 A JP S5697809A JP 17215679 A JP17215679 A JP 17215679A JP 17215679 A JP17215679 A JP 17215679A JP S5697809 A JPS5697809 A JP S5697809A
Authority
JP
Japan
Prior art keywords
layer
dielectric layer
dielectric
conductive layer
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17215679A
Other languages
English (en)
Inventor
Kiyoshi Yokomori
Koichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP17215679A priority Critical patent/JPS5697809A/ja
Publication of JPS5697809A publication Critical patent/JPS5697809A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP17215679A 1979-12-29 1979-12-29 Method and device for measuring thickness of dielectric layer with sandwiched conductive layer Pending JPS5697809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17215679A JPS5697809A (en) 1979-12-29 1979-12-29 Method and device for measuring thickness of dielectric layer with sandwiched conductive layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17215679A JPS5697809A (en) 1979-12-29 1979-12-29 Method and device for measuring thickness of dielectric layer with sandwiched conductive layer

Publications (1)

Publication Number Publication Date
JPS5697809A true JPS5697809A (en) 1981-08-06

Family

ID=15936598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17215679A Pending JPS5697809A (en) 1979-12-29 1979-12-29 Method and device for measuring thickness of dielectric layer with sandwiched conductive layer

Country Status (1)

Country Link
JP (1) JPS5697809A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216506A (ja) * 2008-03-10 2009-09-24 Fujitsu Microelectronics Ltd 容量センサー

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216506A (ja) * 2008-03-10 2009-09-24 Fujitsu Microelectronics Ltd 容量センサー

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