JPS57143253A - Analytical electron microscope - Google Patents

Analytical electron microscope

Info

Publication number
JPS57143253A
JPS57143253A JP56028107A JP2810781A JPS57143253A JP S57143253 A JPS57143253 A JP S57143253A JP 56028107 A JP56028107 A JP 56028107A JP 2810781 A JP2810781 A JP 2810781A JP S57143253 A JPS57143253 A JP S57143253A
Authority
JP
Japan
Prior art keywords
detector
circuit
ray
sample
output signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56028107A
Other languages
Japanese (ja)
Other versions
JPS6322012B2 (en
Inventor
Yoshiyasu Harada
Takeshi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56028107A priority Critical patent/JPS57143253A/en
Publication of JPS57143253A publication Critical patent/JPS57143253A/en
Publication of JPS6322012B2 publication Critical patent/JPS6322012B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable X-ray analysis of a microscopic area to be carried out while affirming the analytic point by constituting an analytical electron microscope from an X-ray detector which detects X-rays developing from a sample, and a means which takes out a detector signal only when an electron beam becomes a spot. CONSTITUTION:An energy-dispersing-type X-ray detector 11 is located near a sample 4, and X-rays developing from the sample 4 are detected by the detector 11. Next, an output signal sent from the detector 11 is amplified properly, and is fed through a switching circuit 12 into a treating circuit 13, in which a given signal treatment is performed. After that, the output signal of the treating circuit 13 is sent to a displaying device or a recording device 14 in order to obtain an X-ray spectrum. the switching circuit 12 is controlled on and off by signals sent from a switch signal generating circuit 10, and feeds the output signal of the detector 11 into the treating circuit 13 only when the circuit 12 is set on. Consequently, X-ray analysis of microscopic areas can be carried out.
JP56028107A 1981-02-27 1981-02-27 Analytical electron microscope Granted JPS57143253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56028107A JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56028107A JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Publications (2)

Publication Number Publication Date
JPS57143253A true JPS57143253A (en) 1982-09-04
JPS6322012B2 JPS6322012B2 (en) 1988-05-10

Family

ID=12239580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56028107A Granted JPS57143253A (en) 1981-02-27 1981-02-27 Analytical electron microscope

Country Status (1)

Country Link
JP (1) JPS57143253A (en)

Also Published As

Publication number Publication date
JPS6322012B2 (en) 1988-05-10

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